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Sander Van Opstal
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Tilburg, NL
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last 30 patents
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Patent Grant
Substrate table for a lithographic apparatus, lithographic apparatu...
Patent number
8,941,815
Issue date
Jan 27, 2015
ASML Netherlands B.V.
Raymond Wilhelmus Louis Lafarre
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
SUBSTRATE TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATU...
Publication number
20110013169
Publication date
Jan 20, 2011
ASML NETHERLANDS B.V.
Raymond Wilhelmus Louis Lafarre
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY