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Sandro WRICKE
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Nuenen, NL
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Patents Grants
last 30 patents
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Patent Grant
Image sensor for immersion lithography
Patent number
11,774,868
Issue date
Oct 3, 2023
ASML Netherlands B.V.
Nirupam Banerjee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sensor mark and a method of manufacturing a sensor mark
Patent number
10,976,196
Issue date
Apr 13, 2021
ASML Netherlands B.V.
Joost André Klugkist
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
IMAGE SENSOR FOR IMMERSION LITHOGRAPHY
Publication number
20220163896
Publication date
May 26, 2022
ASML NETHERLANDS B.V.
Nirupam BANERJEE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
A LITHOGRAPHIC APPARATUS COMPRISING AN OBJECT WITH AN UPPER LAYER H...
Publication number
20210132517
Publication date
May 6, 2021
ASML NETHERLANDS B.V.
Andrey NIKIPELOV
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SENSOR MARK AND A METHOD OF MANUFACTURING A SENSOR MARK
Publication number
20200064183
Publication date
Feb 27, 2020
ASML NETHERLANDS B.V.
Joost André KLUGKIST
G01 - MEASURING TESTING