Sandy Chao

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Sunol, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Gasket with positioning feature for clamped monolithic showerhead e...
- Patent number 8,536,071
- Issue date Sep 17, 2013
- Lam Research Corporation
- Gregory R. Bettencourt
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Clamped monolithic showerhead electrode
- Patent number 8,419,959
- Issue date Apr 16, 2013
- Lam Research Corporation
- Gregory R. Bettencourt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gasket with positioning feature for clamped monolithic showerhead e...
- Patent number 8,272,346
- Issue date Sep 25, 2012
- Lam Research Corporation
- Gregory R. Bettencourt
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Hot edge ring with sloped upper surface
- Patent number 8,084,375
- Issue date Dec 27, 2011
- Lam Research Corporation
- Akira Koshiishi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GASKET WITH POSITIONING FEATURE FOR CLAMPED MONOLITHIC SHOWERHEAD E...
- Publication number 20130034967
- Publication date Feb 7, 2013
- Gregory R. Bettencourt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOT EDGE RING WITH SLOPED UPPER SURFACE
- Publication number 20110104884
- Publication date May 5, 2011
- LAM RESEARCH CORPORATION
- Akira Koshiishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE
- Publication number 20110070740
- Publication date Mar 24, 2011
- LAM RESEARCH CORPORATION
- Gregory R. Bettencourt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GASKET WITH POSITIONING FEATURE FOR CLAMPED MONOLITHIC SHOWERHEAD E...
- Publication number 20100261354
- Publication date Oct 14, 2010
- LAM RESEARCH CORPORATION
- GREGORY R. BETTENCOURT
- H01 - BASIC ELECTRIC ELEMENTS