Sandy M. Wen

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Integrated apparatus for efficient removal of halogen residues from...
- Patent number 9,735,002
- Issue date Aug 15, 2017
- Applied Materials, Inc.
- Mark Naoshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated method and apparatus for efficient removal of halogen re...
- Patent number 7,655,571
- Issue date Feb 2, 2010
- Applied Materials, Inc.
- Mark Naoshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATED APPARATUS FOR EFFICIENT REMOVAL OF HALOGEN RESIDUES FROM...
- Publication number 20090014324
- Publication date Jan 15, 2009
- Mark Naoshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED METHOD AND APPARATUS FOR EFFICIENT REMOVAL OF HALOGEN RE...
- Publication number 20080102646
- Publication date May 1, 2008
- Mark Naoshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS