Sang Hoon Ahn

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Maintenance of photoresist activity on the surface of dielectric ar...
- Patent number 8,211,626
- Issue date Jul 3, 2012
- Applied Materials, Inc.
- Sang H. Ahn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reduction in photoresist footing undercut during development of fea...
- Patent number 8,088,563
- Issue date Jan 3, 2012
- Applied Materials, Inc.
- Sang H. Ahn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Techniques for the use of amorphous carbon (APF) for various etch a...
- Patent number 7,718,081
- Issue date May 18, 2010
- Applied Materials, Inc.
- Wei Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-stage curing of low K nano-porous films
- Patent number 7,611,996
- Issue date Nov 3, 2009
- Applied Materials, Inc.
- Francimar Schmitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques promoting adhesion of porous low K film to underlying ba...
- Patent number 7,547,643
- Issue date Jun 16, 2009
- Applied Materials, Inc.
- Francimar Schmitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a phosphorus doped optical core using a PECVD pro...
- Patent number 7,383,702
- Issue date Jun 10, 2008
- Applied Materials, Inc.
- Hichem M'Saad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a phosphorus doped optical core using a PECVD pro...
- Patent number 7,325,419
- Issue date Feb 5, 2008
- Applied Materials, Inc.
- Hichem M'Saad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to reduce gas-phase reactions in a PECVD process with silico...
- Patent number 7,297,376
- Issue date Nov 20, 2007
- Applied Materials, Inc.
- Kang Sub Yim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nitrogen-free dielectric anti-reflective coating and hardmask
- Patent number 7,105,460
- Issue date Sep 12, 2006
- Applied Materials
- Bok Hoen Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a phosphorus doped optical core using a PECVD pro...
- Patent number 7,080,528
- Issue date Jul 25, 2006
- Applied Materials, Inc.
- Hichem M'Saad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques for the use of amorphous carbon (APF) for various etch a...
- Patent number 7,064,078
- Issue date Jun 20, 2006
- Applied Materials
- Wei Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nitrogen-free dielectric anti-reflective coating and hardmask
- Patent number 6,927,178
- Issue date Aug 9, 2005
- Applied Materials, Inc.
- Bok Hoen Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nitrogen-free antireflective coating for use with photolithographic...
- Patent number 6,853,043
- Issue date Feb 8, 2005
- Applied Materials, Inc.
- Wendy H. Yeh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a silicon nitride layer on a substrate
- Patent number 6,559,074
- Issue date May 6, 2003
- Applied Materials, Inc.
- Steven A. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MULTI-STAGE CURING OF LOW K NANO-POROUS FILMS
- Publication number 20080099920
- Publication date May 1, 2008
- Applied Materials, Inc. a Delaware Corporation
- Francimar Schmitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Maintenance of photoresist adhesion on the surface of dielectric ar...
- Publication number 20070154851
- Publication date Jul 5, 2007
- Sang H. Ahn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method to improve the ashing/wet etch damage resistance and integra...
- Publication number 20070134435
- Publication date Jun 14, 2007
- Sang H. Ahn
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Maintenance of photoresist activity on the surface of dielectric ar...
- Publication number 20070117050
- Publication date May 24, 2007
- APPLIED MATERIALS, INC.
- Sang H. Ahn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF FORMING A PHOSPHORUS DOPED OPTICAL CORE USING A PECVD PRO...
- Publication number 20060266081
- Publication date Nov 30, 2006
- Applied Materials, Inc.
- Hichem M'Saad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES FOR THE USE OF AMORPHOUS CARBON (APF) FOR VARIOUS ETCH A...
- Publication number 20060231524
- Publication date Oct 19, 2006
- Wei Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING A PHOSPHORUS DOPED OPTICAL CORE USING A PECVD PRO...
- Publication number 20060207294
- Publication date Sep 21, 2006
- Applied Materials, Inc.
- Hichem M'Saad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Techniques promoting adhesion of porous low K film to underlying ba...
- Publication number 20050233591
- Publication date Oct 20, 2005
- Applied Materials, Inc.
- Francimar Schmitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-stage curing of low K nano-porous films
- Publication number 20050230834
- Publication date Oct 20, 2005
- Applied Materials, Inc.
- Francimar Schmitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Techniques for the use of amorphous carbon (APF) for various etch a...
- Publication number 20050167394
- Publication date Aug 4, 2005
- Wei liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Maintenance of photoresist adhesion and activity on the surface of...
- Publication number 20050118541
- Publication date Jun 2, 2005
- APPLIED MATERIALS, INC.
- Sang H. Ahn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Nitrogen-free dielectric anti-reflective coating and hardmask
- Publication number 20040214446
- Publication date Oct 28, 2004
- APPLIED MATERIALS, INC.
- Bok Hoen Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Nitrogen-free hard mask over low K dielectric
- Publication number 20040185674
- Publication date Sep 23, 2004
- Applied Materials, Inc.
- Hichem M'Saad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Nitrogen-free antireflective coating for use with photolithographic...
- Publication number 20040087139
- Publication date May 6, 2004
- Applied Materials, Inc.
- Wendy H. Yeh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming a phosphorus doped optical core using a PECVD pro...
- Publication number 20040079118
- Publication date Apr 29, 2004
- Applied Materials Inc.
- Hichem M'Saad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Nitrogen-free dielectric anti-reflective coating and hardmask
- Publication number 20040009676
- Publication date Jan 15, 2004
- APPLIED MATERIALS, INC.
- Bok Hoen Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cycling deposition of low temperature films in a cold wall single w...
- Publication number 20030059535
- Publication date Mar 27, 2003
- Lee Luo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Sang Hoon Ahn

Person

Patents Grantslast 30 patents

Maintenance of photoresist activity on the surface of dielectric ar...

Reduction in photoresist footing undercut during development of fea...

Techniques for the use of amorphous carbon (APF) for various etch a...

Multi-stage curing of low K nano-porous films

Techniques promoting adhesion of porous low K film to underlying ba...

Method of forming a phosphorus doped optical core using a PECVD pro...

Method of forming a phosphorus doped optical core using a PECVD pro...

Method to reduce gas-phase reactions in a PECVD process with silico...

Nitrogen-free dielectric anti-reflective coating and hardmask

Method of forming a phosphorus doped optical core using a PECVD pro...

Techniques for the use of amorphous carbon (APF) for various etch a...

Nitrogen-free dielectric anti-reflective coating and hardmask

Nitrogen-free antireflective coating for use with photolithographic...

Method of forming a silicon nitride layer on a substrate

Patents Applicationslast 30 patents

MULTI-STAGE CURING OF LOW K NANO-POROUS FILMS

Maintenance of photoresist adhesion on the surface of dielectric ar...

Method to improve the ashing/wet etch damage resistance and integra...

Maintenance of photoresist activity on the surface of dielectric ar...

METHOD OF FORMING A PHOSPHORUS DOPED OPTICAL CORE USING A PECVD PRO...

TECHNIQUES FOR THE USE OF AMORPHOUS CARBON (APF) FOR VARIOUS ETCH A...

METHOD OF FORMING A PHOSPHORUS DOPED OPTICAL CORE USING A PECVD PRO...

Techniques promoting adhesion of porous low K film to underlying ba...

Multi-stage curing of low K nano-porous films

Techniques for the use of amorphous carbon (APF) for various etch a...

Maintenance of photoresist adhesion and activity on the surface of...

Nitrogen-free dielectric anti-reflective coating and hardmask

Nitrogen-free hard mask over low K dielectric

Nitrogen-free antireflective coating for use with photolithographic...

Method of forming a phosphorus doped optical core using a PECVD pro...

Nitrogen-free dielectric anti-reflective coating and hardmask

Cycling deposition of low temperature films in a cold wall single w...