Sang J. Cho

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San Jose, CA, US

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Patents Applicationslast 30 patents

Information Patent Application
PAD CONDITIONING FORCE MODELING TO ACHIEVE CONSTANT REMOVAL RATE
- Publication number 20130122783
- Publication date May 16, 2013
- Applied Materials, Inc.
- Gregory E. Menk
- B24 - GRINDING POLISHING
Information Patent Application
CLOSED-LOOP CONTROL OF CMP SLURRY FLOW
- Publication number 20120009847
- Publication date Jan 12, 2012
- Applied Materials, Inc.
- Gregory E. Menk
- B24 - GRINDING POLISHING