Sang Ki NAM

Person

Danville, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multi zone gas injection upper electrode system
- Patent number 11,594,400
- Issue date Feb 28, 2023
- Lam Research Corporation
- Ryan Bise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Peripheral RF feed and symmetric RF return for symmetric RF delivery
- Patent number 11,127,571
- Issue date Sep 21, 2021
- Lam Research Corporation
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi zone gas injection upper electrode system
- Patent number 10,622,195
- Issue date Apr 14, 2020
- Lam Research Corporation
- Ryan Bise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Peripheral RF feed and symmetric RF return for symmetric RF delivery
- Patent number 10,586,686
- Issue date Mar 10, 2020
- Law Research Corporation
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Field guided post exposure bake application for photoresist microbr...
- Patent number 10,048,589
- Issue date Aug 14, 2018
- Applied Materials, Inc.
- Ludovic Godet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist sensitivity and profile improvement via acid anion control d...
- Patent number 9,996,006
- Issue date Jun 12, 2018
- Applied Materials, Inc.
- Christine Y Ouyang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist sensitivity and profile improvement via acid anion control d...
- Patent number 9,927,709
- Issue date Mar 27, 2018
- Applied Materials, Inc.
- Christine Y Ouyang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Laser annealing and electric field
- Patent number 9,864,276
- Issue date Jan 9, 2018
- Applied Materials, Inc.
- Christine Y Ouyang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion field guided exposure and post-exposure bake process
- Patent number 9,829,790
- Issue date Nov 28, 2017
- Applied Materials, Inc.
- Douglas A. Buchberger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Field guided post exposure bake application for photoresist microbr...
- Patent number 9,823,570
- Issue date Nov 21, 2017
- Applied Materials, Inc.
- Ludovic Godet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Ion to neutral control for wafer processing with dual plasma source...
- Patent number 9,793,126
- Issue date Oct 17, 2017
- Lam Research Corporation
- Rajinder Dhindsa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tooling configuration for electric/magnetic field guided acid profi...
- Patent number 9,733,579
- Issue date Aug 15, 2017
- Applied Materials, Inc.
- Sang Ki Nam
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Plasma uniformity control by arrays of unit cell plasmas
- Patent number 9,528,185
- Issue date Dec 27, 2016
- Applied Materials, Inc.
- Sang Ki Nam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Guard aperture to control ion angular distribution in plasma proces...
- Patent number 9,514,918
- Issue date Dec 6, 2016
- Applied Materials, Inc.
- Sang Ki Nam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Material modification by neutral beam source with selected collisio...
- Patent number 9,480,140
- Issue date Oct 25, 2016
- Applied Materials, Inc.
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat transfer plate for a showerhead electrode assembly of a capaci...
- Patent number 9,396,910
- Issue date Jul 19, 2016
- Lam Research Corporation
- Sang Ki Nam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System, method and apparatus for generating pressure pulses in smal...
- Patent number 9,330,927
- Issue date May 3, 2016
- Lam Research Corporation
- Rajinder Dhindsa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual zone temperature control of upper electrodes
- Patent number 9,263,240
- Issue date Feb 16, 2016
- Lam Research Corporation
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Neutral beam source with plasma sheath-shaping neutralization grid
- Patent number 9,253,868
- Issue date Feb 2, 2016
- Applied Materials, Inc.
- Sang Ki Nam
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Showerhead electrode assembly in a capacitively coupled plasma proc...
- Patent number 9,245,718
- Issue date Jan 26, 2016
- Lam Research Corporation
- Sang Ki Nam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for correcting for non-uniformity in a plasma...
- Patent number 9,230,779
- Issue date Jan 5, 2016
- Lam Research Corporation
- Sang Ki Nam
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Showerhead electrode assembly in a capacitively coupled plasma proc...
- Patent number 9,018,022
- Issue date Apr 28, 2015
- Lam Research Corporation
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for selectively modifying RF current paths in...
- Patent number 8,911,588
- Issue date Dec 16, 2014
- Lam Research Corporation
- Sang Ki Nam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chuck assembly for plasma processing
- Patent number 8,898,889
- Issue date Dec 2, 2014
- Lam Research Corporation
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTI ZONE GAS INJECTION UPPER ELECTRODE SYSTEM
- Publication number 20200243307
- Publication date Jul 30, 2020
- LAM RESEARCH CORPORATION
- Ryan Bise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERIPHERAL RF FEED AND SYMMETRIC RF RETURN FOR SYMMETRIC RF DELIVERY
- Publication number 20200161097
- Publication date May 21, 2020
- LAM RESEARCH CORPORATION
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESIST SENSITIVITY AND PROFILE IMPROVEMENT VIA ACID ANION CONTROL D...
- Publication number 20180107117
- Publication date Apr 19, 2018
- Applied Materials, Inc.
- Christine Y. OUYANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FIELD GUIDED POST EXPOSURE BAKE APPLICATION FOR PHOTORESIST MICROBR...
- Publication number 20180046085
- Publication date Feb 15, 2018
- Applied Materials, Inc.
- Ludovic GODET
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ION TO NEUTRAL CONTROL FOR WAFER PROCESSING WITH DUAL PLASMA SOURCE...
- Publication number 20180005852
- Publication date Jan 4, 2018
- LAM RESEARCH CORPORATION
- Rajinder Dhindsa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION TO NEUTRAL CONTROL FOR WAFER PROCESSING WITH DUAL PLASMA SOURCE...
- Publication number 20170213747
- Publication date Jul 27, 2017
- LAM RESEARCH CORPORATION
- Rajinder Dhindsa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER ETCHING SYSTEM WITH REMOTE PLASMA SOURCE AND DC ELECTRODE
- Publication number 20170200587
- Publication date Jul 13, 2017
- Applied Materials, Inc.
- Ludovic GODET
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESIST SENSITIVITY AND PROFILE IMPROVEMENT VIA ACID ANION CONTROL D...
- Publication number 20170184976
- Publication date Jun 29, 2017
- Applied Materials, Inc.
- Christine Y. OUYANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMMERSION FIELD GUIDED EXPOSURE AND POST-EXPOSURE BAKE PROCESS
- Publication number 20160357107
- Publication date Dec 8, 2016
- Applied Materials, Inc.
- Douglas A. BUCHBERGER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LASER ANNEALING AND ELECTRIC FIELD
- Publication number 20160299435
- Publication date Oct 13, 2016
- Applied Materials, Inc.
- Christine Y. OUYANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FIELD GUIDED POST EXPOSURE BAKE APPLICATION FOR PHOTORESIST MICROBR...
- Publication number 20160291476
- Publication date Oct 6, 2016
- Applied Materials, Inc.
- Ludovic GODET
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System, Method and Apparatus for Generating Pressure Pulses in Smal...
- Publication number 20160204007
- Publication date Jul 14, 2016
- LAM RESEARCH CORPORATION
- Rajinder Dhindsa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MATERIAL MODIFICATION BY NEUTRAL BEAM SOURCE WITH SELECTED COLLISIO...
- Publication number 20160148713
- Publication date May 26, 2016
- Applied Materials, Inc.
- Sang Ki Nam
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
TOOLING CONFIGURATION FOR ELECTRIC/MAGNETIC FIELD GUIDED ACID PROFI...
- Publication number 20160109813
- Publication date Apr 21, 2016
- Applied Materials, Inc.
- Sang Ki NAM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GUARD APERTURE TO CONTROL ION ANGULAR DISTRIBUTION IN PLASMA PROCES...
- Publication number 20160093409
- Publication date Mar 31, 2016
- Sang Ki NAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TRANSFER PLATE FOR A SHOWERHEAD ELECTRODE ASSEMBLY OF A CAPACI...
- Publication number 20160079041
- Publication date Mar 17, 2016
- LAM RESEARCH CORPORATION
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA UNIFORMITY CONTROL BY ARRAYS OF UNIT CELL PLASMAS
- Publication number 20160053376
- Publication date Feb 25, 2016
- Applied Materials, Inc.
- Sang Ki NAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD ELECTRODE ASSEMBLY IN A CAPACITIVELY COUPLED PLASMA PROC...
- Publication number 20150194291
- Publication date Jul 9, 2015
- LAM RESEARCH CORPORATION
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION TO NEUTRAL CONTROL FOR WAFER PROCESSING WITH DUAL PLASMA SOURCE...
- Publication number 20150083582
- Publication date Mar 26, 2015
- LAM RESEARCH CORPORATION
- Rajinder Dhindsa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System, Method and Apparatus for Generating Pressure Pulses in Smal...
- Publication number 20150064920
- Publication date Mar 5, 2015
- LAM RESEARCH CORPORATION
- Rajinder Dhindsa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for Selectively Modifying RF Current Paths in a Plasma Proc...
- Publication number 20150053644
- Publication date Feb 26, 2015
- LAM RESEARCH CORPORATION
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD ELECTRODE ASSEMBLY IN A CAPACITIVELY COUPLED PLASMA PROC...
- Publication number 20140087488
- Publication date Mar 27, 2014
- LAM RESEARCH CORPORATION
- Sang Ki Nam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CORRECTING FOR NON-UNIFORMITY IN A PLASMA...
- Publication number 20130240145
- Publication date Sep 19, 2013
- Sang Ki Nam
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHODS AND APPARATUS FOR SELECTIVELY MODIFYING RF CURRENT PATHS IN...
- Publication number 20130240482
- Publication date Sep 19, 2013
- Sang Ki Nam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR SELECTIVELY MODULATING AZIMUTHAL NON-UNIF...
- Publication number 20130240147
- Publication date Sep 19, 2013
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL ZONE TEMPERATURE CONTROL OF UPPER ELECTRODES
- Publication number 20130126476
- Publication date May 23, 2013
- LAM RESEARCH CORPORATION
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERIPHERAL RF FEED AND SYMMETRIC RF RETURN WITH RF STRAP INPUT
- Publication number 20130127124
- Publication date May 23, 2013
- LAM RESEARCH CORPORATION
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Peripheral RF Feed and Symmetric RF Return for Symmetric RF Delivery
- Publication number 20130128409
- Publication date May 23, 2013
- LAM RESEARCH CORPORATION
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS

Sang Ki NAM

Person

Patents Grantslast 30 patents

Multi zone gas injection upper electrode system

Peripheral RF feed and symmetric RF return for symmetric RF delivery

Multi zone gas injection upper electrode system

Peripheral RF feed and symmetric RF return for symmetric RF delivery

Field guided post exposure bake application for photoresist microbr...

Resist sensitivity and profile improvement via acid anion control d...

Resist sensitivity and profile improvement via acid anion control d...

Laser annealing and electric field

Immersion field guided exposure and post-exposure bake process

Field guided post exposure bake application for photoresist microbr...

Ion to neutral control for wafer processing with dual plasma source...

Tooling configuration for electric/magnetic field guided acid profi...

Plasma uniformity control by arrays of unit cell plasmas

Guard aperture to control ion angular distribution in plasma proces...

Material modification by neutral beam source with selected collisio...

Heat transfer plate for a showerhead electrode assembly of a capaci...

System, method and apparatus for generating pressure pulses in smal...

Dual zone temperature control of upper electrodes

Neutral beam source with plasma sheath-shaping neutralization grid

Showerhead electrode assembly in a capacitively coupled plasma proc...

Methods and apparatus for correcting for non-uniformity in a plasma...

Showerhead electrode assembly in a capacitively coupled plasma proc...

Methods and apparatus for selectively modifying RF current paths in...

Chuck assembly for plasma processing

Patents Applicationslast 30 patents

MULTI ZONE GAS INJECTION UPPER ELECTRODE SYSTEM

PERIPHERAL RF FEED AND SYMMETRIC RF RETURN FOR SYMMETRIC RF DELIVERY

RESIST SENSITIVITY AND PROFILE IMPROVEMENT VIA ACID ANION CONTROL D...

FIELD GUIDED POST EXPOSURE BAKE APPLICATION FOR PHOTORESIST MICROBR...

ION TO NEUTRAL CONTROL FOR WAFER PROCESSING WITH DUAL PLASMA SOURCE...

ION TO NEUTRAL CONTROL FOR WAFER PROCESSING WITH DUAL PLASMA SOURCE...

ATOMIC LAYER ETCHING SYSTEM WITH REMOTE PLASMA SOURCE AND DC ELECTRODE

RESIST SENSITIVITY AND PROFILE IMPROVEMENT VIA ACID ANION CONTROL D...

IMMERSION FIELD GUIDED EXPOSURE AND POST-EXPOSURE BAKE PROCESS

LASER ANNEALING AND ELECTRIC FIELD

FIELD GUIDED POST EXPOSURE BAKE APPLICATION FOR PHOTORESIST MICROBR...

System, Method and Apparatus for Generating Pressure Pulses in Smal...

MATERIAL MODIFICATION BY NEUTRAL BEAM SOURCE WITH SELECTED COLLISIO...

TOOLING CONFIGURATION FOR ELECTRIC/MAGNETIC FIELD GUIDED ACID PROFI...

GUARD APERTURE TO CONTROL ION ANGULAR DISTRIBUTION IN PLASMA PROCES...

HEAT TRANSFER PLATE FOR A SHOWERHEAD ELECTRODE ASSEMBLY OF A CAPACI...

PLASMA UNIFORMITY CONTROL BY ARRAYS OF UNIT CELL PLASMAS

SHOWERHEAD ELECTRODE ASSEMBLY IN A CAPACITIVELY COUPLED PLASMA PROC...

ION TO NEUTRAL CONTROL FOR WAFER PROCESSING WITH DUAL PLASMA SOURCE...

System, Method and Apparatus for Generating Pressure Pulses in Smal...

Methods for Selectively Modifying RF Current Paths in a Plasma Proc...

SHOWERHEAD ELECTRODE ASSEMBLY IN A CAPACITIVELY COUPLED PLASMA PROC...

METHODS AND APPARATUS FOR CORRECTING FOR NON-UNIFORMITY IN A PLASMA...

METHODS AND APPARATUS FOR SELECTIVELY MODIFYING RF CURRENT PATHS IN...

METHODS AND APPARATUS FOR SELECTIVELY MODULATING AZIMUTHAL NON-UNIF...

DUAL ZONE TEMPERATURE CONTROL OF UPPER ELECTRODES

PERIPHERAL RF FEED AND SYMMETRIC RF RETURN WITH RF STRAP INPUT

Peripheral RF Feed and Symmetric RF Return for Symmetric RF Delivery