Sang Lee

Follow

Person

Saratoga, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and systems for evaluating extreme ultraviolet mask flatness
- Patent number 9,104,122
- Issue date Aug 11, 2015
- IMEC
- Gian Francesco Lorusso
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Methods and Systems for Evaluating Extreme Ultraviolet Mask Flatness
- Publication number 20120075604
- Publication date Mar 29, 2012
- IMEC
- Gian Francesco Lorusso
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY