Sang Phil Lee

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Youngin-Shi, CN

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Patents Grantslast 30 patents

Information Patent Grant
In-situ chamber cleaning for an RTP chamber
- Patent number 8,821,643
- Issue date Sep 2, 2014
- Applied Materials, Inc.
- Balasubramanian Ramachandran
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
IN-SITU CHAMBER CLEANING FOR AN RTP CHAMBER
- Publication number 20130178072
- Publication date Jul 11, 2013
- BALASUBRAMANIAN RAMACHANDRAN
- B08 - CLEANING