Sang-Yoon SOH

Person

Hwaseong-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Sensor module for detecting a process environment in semiconductor...
- Patent number 10,627,206
- Issue date Apr 21, 2020
- Samsung Electronics Co., Ltd.
- Young-ho Hwang
- G01 - MEASURING TESTING
Information Patent Grant
Designed waveform generator for semiconductor equipment, plasma pro...
- Patent number 10,474,184
- Issue date Nov 12, 2019
- Samsung Electronics Co., Ltd.
- Hyun-Bae Kim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Diagnosing an abnormal state of a substrate-processing apparatus
- Patent number 10,281,520
- Issue date May 7, 2019
- Samsung Electronics Co., Ltd.
- Dae-Sung Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for controlling fault tolerance
- Patent number 9,843,284
- Issue date Dec 12, 2017
- Samsung Electronics Co., Ltd.
- Young-Ho Hwang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Electrostatic chuck assembly, semiconductor manufacturing apparatus...
- Patent number 9,812,372
- Issue date Nov 7, 2017
- Samsung Electronics Co., Ltd.
- Youn Sok Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual inverter system and method of controlling the same
- Patent number 9,306,488
- Issue date Apr 5, 2016
- Samsung Electronics Co., Ltd.
- Sang-Yoon Soh
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
SENSOR MODULE, A SEMICONDUCTOR MANUFACTURING APPARATUS, AND A METHO...
- Publication number 20190113324
- Publication date Apr 18, 2019
- Samsung Electronics Co., Ltd.
- Young-ho Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIAGNOSING AN ABNORMAL STATE OF A SUBSTRATE-PROCESSING APPARATUS
- Publication number 20180059168
- Publication date Mar 1, 2018
- Samsung Electronics Co., Ltd.
- Dae-Sung Jung
- G01 - MEASURING TESTING
Information Patent Application
DESIGNED WAVEFORM GENERATOR FOR SEMICONDUCTOR EQUIPMENT, PLASMA PRO...
- Publication number 20180032100
- Publication date Feb 1, 2018
- Samsung Electronics Co., Ltd.
- HYUN-BAE KIM
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ELECTROSTATIC CHUCK ASSEMBLY, SEMICONDUCTOR MANUFACTURING APPARATUS...
- Publication number 20170178978
- Publication date Jun 22, 2017
- Samsung Electronics Co., Ltd.
- Youn Sok CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR CONTROLLING FAULT TOLERANCE
- Publication number 20160006376
- Publication date Jan 7, 2016
- Samsung Electronics Co., Ltd.
- YOUNG-HO HWANG
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
DUAL INVERTER SYSTEM AND METHOD OF CONTROLLING THE SAME
- Publication number 20150077030
- Publication date Mar 19, 2015
- Samsung Electronics Co., Ltd.
- Sang-Yoon SOH
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Sang-Yoon SOH

Person

Patents Grantslast 30 patents

Sensor module for detecting a process environment in semiconductor...

Designed waveform generator for semiconductor equipment, plasma pro...

Diagnosing an abnormal state of a substrate-processing apparatus

System for controlling fault tolerance

Electrostatic chuck assembly, semiconductor manufacturing apparatus...

Dual inverter system and method of controlling the same

Patents Applicationslast 30 patents

SENSOR MODULE, A SEMICONDUCTOR MANUFACTURING APPARATUS, AND A METHO...

DIAGNOSING AN ABNORMAL STATE OF A SUBSTRATE-PROCESSING APPARATUS

DESIGNED WAVEFORM GENERATOR FOR SEMICONDUCTOR EQUIPMENT, PLASMA PRO...

ELECTROSTATIC CHUCK ASSEMBLY, SEMICONDUCTOR MANUFACTURING APPARATUS...

SYSTEM FOR CONTROLLING FAULT TOLERANCE

DUAL INVERTER SYSTEM AND METHOD OF CONTROLLING THE SAME