Sangbong Park

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Image contrast metrics for deriving and improving imaging conditions
- Patent number 12,056,867
- Issue date Aug 6, 2024
- KLA Corporation
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection with previous step subtraction
- Patent number 11,921,052
- Issue date Mar 5, 2024
- KLA Corporation
- Robert M. Danen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Optical image contrast metric for optical target search
- Patent number 11,803,960
- Issue date Oct 31, 2023
- KLA Corporation
- Huan Jin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Design-assisted inspection for DRAM and 3D NAND devices
- Patent number 11,783,470
- Issue date Oct 10, 2023
- KLA Corporation
- Junqing Huang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Deep learning based defect detection
- Patent number 11,776,108
- Issue date Oct 3, 2023
- KLA Corp.
- Richard Wallingford
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Setting up inspection of a specimen
- Patent number 11,748,872
- Issue date Sep 5, 2023
- KLA Corp.
- Hong Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Selecting defect detection methods for inspection of a specimen
- Patent number 11,619,592
- Issue date Apr 4, 2023
- KLA Corp.
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Clustering sub-care areas based on noise characteristics
- Patent number 11,615,993
- Issue date Mar 28, 2023
- KLA Corporation
- Boshi Huang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Controlling a process for inspection of a specimen
- Patent number 11,416,982
- Issue date Aug 16, 2022
- KLA Corp.
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Design-assisted inspection for DRAM and 3D NAND devices
- Patent number 11,308,606
- Issue date Apr 19, 2022
- KLA Corporation
- Junqing Huang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Unsupervised learning-based reference selection for enhanced defect...
- Patent number 11,120,546
- Issue date Sep 14, 2021
- KLA Corporation
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect-location determination using correction loop for pixel align...
- Patent number 11,049,745
- Issue date Jun 29, 2021
- KLA Corporation
- David Dowling
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Optical-mode selection for multi-mode semiconductor inspection
- Patent number 11,010,885
- Issue date May 18, 2021
- KLA Corporation
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multi-model metrology
- Patent number 9,412,673
- Issue date Aug 9, 2016
- KLA-Tencor Corporation
- In-Kyo Kim
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus of recognizing gesture with untouched way
- Patent number 8,937,601
- Issue date Jan 20, 2015
- Korea University Research and Business Foundation
- Hoh Peter In
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for performing dark field double dipole lithog...
- Patent number 8,632,930
- Issue date Jan 21, 2014
- ASML Masktools B.V.
- Duan-Fu Stephen Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method, program product and apparatus for generating a calibrated p...
- Patent number 8,120,753
- Issue date Feb 21, 2012
- ASML Masktools B.V.
- Gabriel Berger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for performing dark field double dipole lithog...
- Patent number 7,981,576
- Issue date Jul 19, 2011
- ASML Masktools B.V.
- Duan-Fu Stephen Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for performing dark field double dipole lithog...
- Patent number 7,824,826
- Issue date Nov 2, 2010
- ASML Masktools B.V.
- Duan-Fu Stephen Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method, program product and apparatus for obtaining short-range fla...
- Patent number 7,818,151
- Issue date Oct 19, 2010
- ASML Masktools B.V.
- Tamer Coskun
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of performing resist process calibration/optimization and DO...
- Patent number 7,652,758
- Issue date Jan 26, 2010
- ASML Masktools B.V.
- Sangbong Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for generating OPC rules for placement of scat...
- Patent number 7,614,034
- Issue date Nov 3, 2009
- ASML Masktools B.V.
- Douglas Van Den Broeke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method, program product and apparatus for improving calibration of...
- Patent number 7,494,753
- Issue date Feb 24, 2009
- ASML Masktools B.V.
- Jang Fung Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of performing multiple stage model calibration for optical i...
- Patent number 7,433,791
- Issue date Oct 7, 2008
- ASML Masktools B.V.
- Sangbong Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of performing resist process calibration/optimization and DO...
- Patent number 7,116,411
- Issue date Oct 3, 2006
- ASML Masktools B.V.
- Sangbong Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DETECTING DEFECTS ON SPECIMENS
- Publication number 20240296545
- Publication date Sep 5, 2024
- KLA Corporation
- Chunwei Song
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTIMODE DEFECT DETECTION
- Publication number 20240161272
- Publication date May 16, 2024
- KLA Corporation
- Sangbong Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEEP LEARNING MODEL-BASED ALIGNMENT FOR SEMICONDUCTOR APPLICATIONS
- Publication number 20240095935
- Publication date Mar 21, 2024
- KLA Corporation
- Hong Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DETECTING DEFECTS ON SPECIMENS
- Publication number 20240054632
- Publication date Feb 15, 2024
- KLA Corporation
- Li Yu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION WITH PREVIOUS STEP SUBTRACTION
- Publication number 20230316478
- Publication date Oct 5, 2023
- KLA Corporation
- Robert M. Danen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMAGE CONTRAST METRICS FOR DERIVING AND IMPROVING IMAGING CONDITIONS
- Publication number 20220405903
- Publication date Dec 22, 2022
- KLA Corporation
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DESIGN-ASSISTED INSPECTION FOR DRAM AND 3D NAND DEVICES
- Publication number 20220245791
- Publication date Aug 4, 2022
- KLA Corporation
- Junqing Huang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Setting Up Inspection of a Specimen
- Publication number 20220067898
- Publication date Mar 3, 2022
- KLA Corporation
- Hong Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OPTICAL IMAGE CONTRAST METRIC FOR OPTICAL TARGET SEARCH
- Publication number 20220051380
- Publication date Feb 17, 2022
- KLA Corporation
- Huan Jin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEEP LEARNING BASED DEFECT DETECTION
- Publication number 20220044391
- Publication date Feb 10, 2022
- KLA Corporation
- Richard Wallingford
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Clustering Sub-Care Areas Based on Noise Characteristics
- Publication number 20210159127
- Publication date May 27, 2021
- KLA Corporation
- Boshi Huang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CONTROLLING A PROCESS FOR INSPECTION OF A SPECIMEN
- Publication number 20210097666
- Publication date Apr 1, 2021
- KLA Corporation
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Unsupervised Learning-Based Reference Selection for Enhanced Defect...
- Publication number 20210090229
- Publication date Mar 25, 2021
- KLA Corporation
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DESIGN-ASSISTED INSPECTION FOR DRAM AND 3D NAND DEVICES
- Publication number 20210049755
- Publication date Feb 18, 2021
- KLA Corporation
- Junqing Huang
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR SELECTING DEFECT DETECTION METHODS FOR INSP...
- Publication number 20210010945
- Publication date Jan 14, 2021
- KLA Corporation
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Optical-Mode Selection for Multi-Mode Semiconductor Inspection
- Publication number 20200193588
- Publication date Jun 18, 2020
- KLA-Tencor Corporation
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect-Location Determination Using Correction Loop for Pixel Align...
- Publication number 20200126830
- Publication date Apr 23, 2020
- KLA-Tencor Corporation
- David Dowling
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTI-MODEL METROLOGY
- Publication number 20160322267
- Publication date Nov 3, 2016
- KLA-Tencor Corporation
- In-Kyo Kim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTI-MODEL METROLOGY
- Publication number 20150058813
- Publication date Feb 26, 2015
- KLA-Tencor Corporation
- In-Kyo Kim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS OF RECOGNIZING GESTURE WITH UNTOUCHED WAY
- Publication number 20120075176
- Publication date Mar 29, 2012
- Korea University Research and Business Foundation
- Hoh Peter In
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD FOR PROVIDING ASYNCHRONOUS DATA COMMUNICATION IN...
- Publication number 20110307631
- Publication date Dec 15, 2011
- Sangbong Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and Apparatus for Performing Dark Field Double Dipole Lithog...
- Publication number 20110236808
- Publication date Sep 29, 2011
- ASML Mask Tools B.V.
- Duan-Fu Stephen Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and Apparatus for Performing Dark Field Double Dipole Lithog...
- Publication number 20110014552
- Publication date Jan 20, 2011
- ASML Mask Tools B.V.
- Duan-Fu Stephen Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF COMPACT DISPLAY COMBINED WITH PROPERTY-TABLE-VIEW FOR A C...
- Publication number 20090138500
- Publication date May 28, 2009
- Zhiqiang YUAN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method, program product and apparatus for generating a calibrated p...
- Publication number 20080204690
- Publication date Aug 28, 2008
- Gabriel Berger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for performing dark field double dipole lithog...
- Publication number 20080020296
- Publication date Jan 24, 2008
- Duan-Fu Stephen Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method, program product and apparatus for obtaining short-range fla...
- Publication number 20070260437
- Publication date Nov 8, 2007
- Tamer Coskun
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of performing multiple stage model calibration for optical i...
- Publication number 20070213967
- Publication date Sep 13, 2007
- Sangbong Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for generating OPC rules for placement of scat...
- Publication number 20070122719
- Publication date May 31, 2007
- Douglas Van Den Broeke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of performing resist process calibration/optimization and DO...
- Publication number 20070002311
- Publication date Jan 4, 2007
- ASML MASKTOOLS B.V.
- SangBong Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Sangbong Park

Person

Patents Grantslast 30 patents

Image contrast metrics for deriving and improving imaging conditions

Inspection with previous step subtraction

Optical image contrast metric for optical target search

Design-assisted inspection for DRAM and 3D NAND devices

Deep learning based defect detection

Setting up inspection of a specimen

Selecting defect detection methods for inspection of a specimen

Clustering sub-care areas based on noise characteristics

Controlling a process for inspection of a specimen

Design-assisted inspection for DRAM and 3D NAND devices

Unsupervised learning-based reference selection for enhanced defect...

Defect-location determination using correction loop for pixel align...

Optical-mode selection for multi-mode semiconductor inspection

Multi-model metrology

Method and apparatus of recognizing gesture with untouched way

Method and apparatus for performing dark field double dipole lithog...

Method, program product and apparatus for generating a calibrated p...

Method and apparatus for performing dark field double dipole lithog...

Method and apparatus for performing dark field double dipole lithog...

Method, program product and apparatus for obtaining short-range fla...

Method of performing resist process calibration/optimization and DO...

Method and apparatus for generating OPC rules for placement of scat...

Method, program product and apparatus for improving calibration of...

Method of performing multiple stage model calibration for optical i...

Method of performing resist process calibration/optimization and DO...

Patents Applicationslast 30 patents

DETECTING DEFECTS ON SPECIMENS

MULTIMODE DEFECT DETECTION

DEEP LEARNING MODEL-BASED ALIGNMENT FOR SEMICONDUCTOR APPLICATIONS

DETECTING DEFECTS ON SPECIMENS

INSPECTION WITH PREVIOUS STEP SUBTRACTION

IMAGE CONTRAST METRICS FOR DERIVING AND IMPROVING IMAGING CONDITIONS

DESIGN-ASSISTED INSPECTION FOR DRAM AND 3D NAND DEVICES

Setting Up Inspection of a Specimen

OPTICAL IMAGE CONTRAST METRIC FOR OPTICAL TARGET SEARCH

DEEP LEARNING BASED DEFECT DETECTION

Clustering Sub-Care Areas Based on Noise Characteristics

CONTROLLING A PROCESS FOR INSPECTION OF A SPECIMEN

Unsupervised Learning-Based Reference Selection for Enhanced Defect...

DESIGN-ASSISTED INSPECTION FOR DRAM AND 3D NAND DEVICES

SYSTEMS AND METHODS FOR SELECTING DEFECT DETECTION METHODS FOR INSP...

Optical-Mode Selection for Multi-Mode Semiconductor Inspection

Defect-Location Determination Using Correction Loop for Pixel Align...

MULTI-MODEL METROLOGY

MULTI-MODEL METROLOGY

METHOD AND APPARATUS OF RECOGNIZING GESTURE WITH UNTOUCHED WAY

SYSTEM AND METHOD FOR PROVIDING ASYNCHRONOUS DATA COMMUNICATION IN...

Method and Apparatus for Performing Dark Field Double Dipole Lithog...

Method and Apparatus for Performing Dark Field Double Dipole Lithog...

METHOD OF COMPACT DISPLAY COMBINED WITH PROPERTY-TABLE-VIEW FOR A C...

Method, program product and apparatus for generating a calibrated p...

Method and apparatus for performing dark field double dipole lithog...

Method, program product and apparatus for obtaining short-range fla...

Method of performing multiple stage model calibration for optical i...

Method and apparatus for generating OPC rules for placement of scat...

Method of performing resist process calibration/optimization and DO...