Sangdong KWON

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Seoul, KR

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck assembly and substrate processing apparatus inc...
- Patent number 10,497,597
- Issue date Dec 3, 2019
- Samsung Electronics Co., Ltd.
- Jaehyun Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS INC...
- Publication number 20180053674
- Publication date Feb 22, 2018
- Samsung Electronics Co., Ltd.
- Jaehyun LEE
- H01 - BASIC ELECTRIC ELEMENTS