Sanghee EOM

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Patents Grantslast 30 patents

Information Patent Grant
Substrate transfer apparatus and method, and substrate processing a...
- Patent number 9,390,957
- Issue date Jul 12, 2016
- PSK Inc.
- Sanghee Eom
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND METHOD, AND SUBSTRATE PROCESSING A...
- Publication number 20150200122
- Publication date Jul 16, 2015
- PSK INC.
- Sanghee EOM
- H01 - BASIC ELECTRIC ELEMENTS