Sanghwan Lee

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Suwon-si, KR

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Patents Applicationslast 30 patents

Information Patent Application
EXTREME ULTRAVIOLET EXPOSURE APPARATUS INCLUDING A MASK STAGE
- Publication number 20240219848
- Publication date Jul 4, 2024
- Samsung Electronics Co., Ltd.
- Sanghwan LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF CORRECTING EUV OVERLAY AND METHOD OF MANUFACTURING SEMICO...
- Publication number 20240176230
- Publication date May 30, 2024
- Samsung Electronics Co., Ltd.
- Hachul Shin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY