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  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20220044916
    • Publication date Feb 10, 2022
    • ASM IP HOLDING B.V.
    • KiChul Um
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20210287878
    • Publication date Sep 16, 2021
    • ASM IP HOLDING B.V.
    • KiChul Um
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SYSTEM FOR FABRICATING A SEMICONDUCTOR DEVICE
    • Publication number 20190287766
    • Publication date Sep 19, 2019
    • Samsung Electronics Co., Ltd.
    • SANGJEAN JEON
    • H01 - BASIC ELECTRIC ELEMENTS