Sangjun Cho

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Pleasanton, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for generating vertical profiles in organic layer etches
- Patent number 10,546,756
- Issue date Jan 28, 2020
- Lam Research Corporation
- Sriharsha Jayanti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ photoresist strip during plasma etching of active hard mask
- Patent number 8,912,633
- Issue date Dec 16, 2014
- Lam Research Corporation
- Sangjun Cho
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
In-situ photoresist strip during plasma etching of active hard mask
- Patent number 8,283,255
- Issue date Oct 9, 2012
- Lam Research Corporation
- Sangjun Cho
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of and apparatus for reducing amounts of particles on a waf...
- Patent number 7,782,591
- Issue date Aug 24, 2010
- Lam Research Corporation
- Sangjun Cho
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR GENERATING VERTICAL PROFILES IN ORGANIC LAYER ETCHES
- Publication number 20180151386
- Publication date May 31, 2018
- LAM RESEARCH CORPORATION
- Sriharsha JAYANTI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU PHOTORESIST STRIP DURING PLASMA ETCHING OF ACTIVE HARD MASK
- Publication number 20130001754
- Publication date Jan 3, 2013
- LAM RESEARCH CORPORATION
- Sangjun Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of and apparatus for reducing amounts of particles on a waf...
- Publication number 20080314733
- Publication date Dec 25, 2008
- LAM RESEARCH CORPORATION
- Sangjun Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
In-situ photoresist strip during plasma etching of active hard mask
- Publication number 20080293249
- Publication date Nov 27, 2008
- Lam Research Corporation
- Sangjun Cho
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY