Sangjun Han

Person

  • Cambridge, MA, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Method of uniformly coating a substrate

    • Patent number 7,030,039
    • Issue date Apr 18, 2006
    • ASML Holding N.V.
    • Emir Gurer
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    High efficiency photoresist coating

    • Patent number 6,191,053
    • Issue date Feb 20, 2001
    • Silicon Valley Group, Inc.
    • Jung-Hoon Chun
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents