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Sangjun Han
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Cambridge, MA, US
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last 30 patents
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Patent Grant
Method of uniformly coating a substrate
Patent number
7,030,039
Issue date
Apr 18, 2006
ASML Holding N.V.
Emir Gurer
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
High efficiency photoresist coating
Patent number
6,191,053
Issue date
Feb 20, 2001
Silicon Valley Group, Inc.
Jung-Hoon Chun
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Method of uniformly coating a substrate
Publication number
20020098283
Publication date
Jul 25, 2002
Emir Gurer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High efficiency photoresist coating
Publication number
20010001746
Publication date
May 24, 2001
Jung-Hoon Chun
H01 - BASIC ELECTRIC ELEMENTS