Sangjun PARK

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Directional deposition in etch chamber
- Patent number 11,742,212
- Issue date Aug 29, 2023
- Lam Research Corporation
- Zhongkui Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Line edge roughness improvement with photon-assisted plasma process
- Patent number 9,859,127
- Issue date Jan 2, 2018
- Lam Research Corporation
- Zhongkui Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PLASMA ETCHING IN SEMICONDUCTOR PROCESSING
- Publication number 20250062131
- Publication date Feb 20, 2025
- Applied Materials, Inc.
- Hanbyul Jin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ETCHING HIGH ASPECT RATIO STRUCTURES
- Publication number 20240332031
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Feng QIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIRECTIONAL DEPOSITION IN ETCH CHAMBER
- Publication number 20220028697
- Publication date Jan 27, 2022
- LAM RESEARCH CORPORATION
- Zhongkui Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINE EDGE ROUGHNESS IMPROVEMENT WITH PHOTON-ASSISTED PLASMA PROCESS
- Publication number 20170358456
- Publication date Dec 14, 2017
- LAM RESEARCH CORPORATION
- Zhongkui TAN
- H01 - BASIC ELECTRIC ELEMENTS