Sangki NAM

Person

Seongnam-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
System of semiconductor process and control method thereof
- Patent number 12,125,687
- Issue date Oct 22, 2024
- Samsung Electronics Co., Ltd.
- Youngdo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for measuring density of plasma, plasma processing system, a...
- Patent number 12,087,550
- Issue date Sep 10, 2024
- Samsung Electronics Co., Ltd.
- Vladimir Vsevolodovich Protopopov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for radical diagnostic in plasma processing chamber, radical...
- Patent number 11,996,275
- Issue date May 28, 2024
- Samsung Electronics Co., Ltd.
- Sungyong Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning collector of EUV light source system
- Patent number 11,940,620
- Issue date Mar 26, 2024
- Samsung Electronics Co., Ltd.
- Changsoon Lim
- B08 - CLEANING
Information Patent Grant
Upper electrode and substrate processing apparatus including the same
- Patent number 11,869,751
- Issue date Jan 9, 2024
- Samsung Electronics Co., Ltd.
- Byungjo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Variable frequency and non-sinusoidal power generator using double...
- Patent number 11,705,306
- Issue date Jul 18, 2023
- Samsung Electronics Co., Ltd.
- Hyunbae Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Upper electrode and substrate processing apparatus including the same
- Patent number 11,545,344
- Issue date Jan 3, 2023
- Samsung Electronics Co., Ltd.
- Byungjo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam generator, plasma processing apparatus having the sam...
- Patent number 11,195,696
- Issue date Dec 7, 2021
- Samsung Electronics Co., Ltd.
- Dongkyu Shin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA DENSITY MEASUREMENT SENSOR, APPARATUS FOR MEASURING REAL-TIM...
- Publication number 20240274418
- Publication date Aug 15, 2024
- Samsung Electronics Co., Ltd.
- Sungho Jang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA MONITORING SYSTEM AND METHOD OF MONITORING PLASMA
- Publication number 20240274419
- Publication date Aug 15, 2024
- Samsung Electronics Co., Ltd.
- Kwangho LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
- Publication number 20240212992
- Publication date Jun 27, 2024
- Samsung Electronics Co., Ltd.
- Changheon Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POST BAKING APPARATUS
- Publication number 20240192604
- Publication date Jun 13, 2024
- Samsung Electronics Co., Ltd.
- Jaehong LIM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR MEASURING RADICAL DENSITY DISTRIBUTION BASED ON LIGHT...
- Publication number 20240159657
- Publication date May 16, 2024
- Samsung Electronics Co., Ltd.
- Sejin OH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE
- Publication number 20240147698
- Publication date May 2, 2024
- Samsung Electronics Co., Ltd.
- Geonyeop Lee
Information Patent Application
APPARATUS FOR PROCESSING PLASMA AND METHOD OF PROCESSING PLASMA AND...
- Publication number 20240128055
- Publication date Apr 18, 2024
- Samsung Electronics Co., Ltd.
- Hyunbae Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESS DEVICE
- Publication number 20240047247
- Publication date Feb 8, 2024
- Samsung Electronics Co., Ltd.
- Chansoo KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF PROCESSING SUBSTRATES AND APPARATUSES THEREOF
- Publication number 20240038510
- Publication date Feb 1, 2024
- Samsung Electronics Co., Ltd.
- Changheon LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230317418
- Publication date Oct 5, 2023
- Samsung Electronics Co., Ltd.
- Jungmin KO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR RADICAL DIAGNOSTIC IN PLASMA PROCESSING CHAMBER, RADICAL...
- Publication number 20230197423
- Publication date Jun 22, 2023
- Samsung Electronics Co., Ltd.
- Sungyong LIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20230143049
- Publication date May 11, 2023
- Samsung Electronics Co., Ltd.
- Seunghan Baek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UPPER ELECTRODE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
- Publication number 20230123891
- Publication date Apr 20, 2023
- Samsung Electronics Co., Ltd.
- Byungjo KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA GENERATOR, PLASMA PROCESSING DEVICE, AND METHOD OF MANUFACTU...
- Publication number 20230117953
- Publication date Apr 20, 2023
- Samsung Electronics Co., Ltd.
- Sejin OH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR ARCING DIAGNOSIS, PLASMA PROCESS EQUIPMENT INCLUDING...
- Publication number 20230109672
- Publication date Apr 13, 2023
- Samsung Electronics Co., Ltd.
- Changsoon Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR MEASURING DENSITY OF PLASMA, PLASMA PROCESSING SYSTEM, A...
- Publication number 20230102201
- Publication date Mar 30, 2023
- Samsung Electronics Co., Ltd.
- Vladimir Vsevolodovich PROTOPOPOV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM OF SEMICONDUCTOR PROCESS AND CONTROL METHOD THEREOF
- Publication number 20230005723
- Publication date Jan 5, 2023
- Samsung Electronics Co., Ltd.
- YOUNGDO KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CLEANING COLLECTOR OF EUV LIGHT SOURCE SYSTEM
- Publication number 20220308339
- Publication date Sep 29, 2022
- Samsung Electronics Co., Ltd.
- Changsoon LIM
- B08 - CLEANING
Information Patent Application
VARIABLE FREQUENCY AND NON-SINUSOIDAL POWER GENERATOR USING DOUBLE...
- Publication number 20220262599
- Publication date Aug 18, 2022
- Samsung Electronics Co., Ltd.
- Hyunbae KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF PROCESSING SUBSTRATES AND APPARATUSES THEREOF
- Publication number 20220139714
- Publication date May 5, 2022
- Samsung Electronics Co., Ltd.
- Changheon LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UPPER ELECTRODE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
- Publication number 20220051877
- Publication date Feb 17, 2022
- Samsung Electronics Co., Ltd.
- Byungjo KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210384012
- Publication date Dec 9, 2021
- Samsung Electronics Co., Ltd.
- Jinhyuk CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM GENERATOR, PLASMA PROCESSING APPARATUS HAVING THE SAM...
- Publication number 20210110997
- Publication date Apr 15, 2021
- Samsung Electronics Co., Ltd.
- Dongkyu SHIN
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

System of semiconductor process and control method thereof

Device for measuring density of plasma, plasma processing system, a...

Device for radical diagnostic in plasma processing chamber, radical...

Method of cleaning collector of EUV light source system

Upper electrode and substrate processing apparatus including the same

Variable frequency and non-sinusoidal power generator using double...

Upper electrode and substrate processing apparatus including the same

Electron beam generator, plasma processing apparatus having the sam...

Patents Applicationslast 30 patents

PLASMA DENSITY MEASUREMENT SENSOR, APPARATUS FOR MEASURING REAL-TIM...

PLASMA MONITORING SYSTEM AND METHOD OF MONITORING PLASMA

PLASMA PROCESSING APPARATUS AND METHOD

POST BAKING APPARATUS

APPARATUS FOR MEASURING RADICAL DENSITY DISTRIBUTION BASED ON LIGHT...

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE

APPARATUS FOR PROCESSING PLASMA AND METHOD OF PROCESSING PLASMA AND...

SEMICONDUCTOR PROCESS DEVICE

METHODS OF PROCESSING SUBSTRATES AND APPARATUSES THEREOF

SUBSTRATE PROCESSING APPARATUS

DEVICE FOR RADICAL DIAGNOSTIC IN PLASMA PROCESSING CHAMBER, RADICAL...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

UPPER ELECTRODE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

PLASMA GENERATOR, PLASMA PROCESSING DEVICE, AND METHOD OF MANUFACTU...

APPARATUS FOR ARCING DIAGNOSIS, PLASMA PROCESS EQUIPMENT INCLUDING...

DEVICE FOR MEASURING DENSITY OF PLASMA, PLASMA PROCESSING SYSTEM, A...

SYSTEM OF SEMICONDUCTOR PROCESS AND CONTROL METHOD THEREOF

METHOD OF CLEANING COLLECTOR OF EUV LIGHT SOURCE SYSTEM

VARIABLE FREQUENCY AND NON-SINUSOIDAL POWER GENERATOR USING DOUBLE...

METHODS OF PROCESSING SUBSTRATES AND APPARATUSES THEREOF

UPPER ELECTRODE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

SUBSTRATE PROCESSING APPARATUS

ELECTRON BEAM GENERATOR, PLASMA PROCESSING APPARATUS HAVING THE SAM...