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Patents Grants
last 30 patents
Information
Patent Grant
Device for measuring density of plasma, plasma processing system, a...
Patent number
12,087,550
Issue date
Sep 10, 2024
Samsung Electronics Co., Ltd.
Vladimir Vsevolodovich Protopopov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for radical diagnostic in plasma processing chamber, radical...
Patent number
11,996,275
Issue date
May 28, 2024
Samsung Electronics Co., Ltd.
Sungyong Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of cleaning collector of EUV light source system
Patent number
11,940,620
Issue date
Mar 26, 2024
Samsung Electronics Co., Ltd.
Changsoon Lim
B08 - CLEANING
Information
Patent Grant
Upper electrode and substrate processing apparatus including the same
Patent number
11,869,751
Issue date
Jan 9, 2024
Samsung Electronics Co., Ltd.
Byungjo Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Variable frequency and non-sinusoidal power generator using double...
Patent number
11,705,306
Issue date
Jul 18, 2023
Samsung Electronics Co., Ltd.
Hyunbae Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Upper electrode and substrate processing apparatus including the same
Patent number
11,545,344
Issue date
Jan 3, 2023
Samsung Electronics Co., Ltd.
Byungjo Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam generator, plasma processing apparatus having the sam...
Patent number
11,195,696
Issue date
Dec 7, 2021
Samsung Electronics Co., Ltd.
Dongkyu Shin
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA DENSITY MEASUREMENT SENSOR, APPARATUS FOR MEASURING REAL-TIM...
Publication number
20240274418
Publication date
Aug 15, 2024
Samsung Electronics Co., Ltd.
Sungho Jang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA MONITORING SYSTEM AND METHOD OF MONITORING PLASMA
Publication number
20240274419
Publication date
Aug 15, 2024
Samsung Electronics Co., Ltd.
Kwangho LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
Publication number
20240212992
Publication date
Jun 27, 2024
Samsung Electronics Co., Ltd.
Changheon Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POST BAKING APPARATUS
Publication number
20240192604
Publication date
Jun 13, 2024
Samsung Electronics Co., Ltd.
Jaehong LIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS FOR MEASURING RADICAL DENSITY DISTRIBUTION BASED ON LIGHT...
Publication number
20240159657
Publication date
May 16, 2024
Samsung Electronics Co., Ltd.
Sejin OH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE
Publication number
20240147698
Publication date
May 2, 2024
Samsung Electronics Co., Ltd.
Geonyeop Lee
Information
Patent Application
APPARATUS FOR PROCESSING PLASMA AND METHOD OF PROCESSING PLASMA AND...
Publication number
20240128055
Publication date
Apr 18, 2024
Samsung Electronics Co., Ltd.
Hyunbae Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESS DEVICE
Publication number
20240047247
Publication date
Feb 8, 2024
Samsung Electronics Co., Ltd.
Chansoo KANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF PROCESSING SUBSTRATES AND APPARATUSES THEREOF
Publication number
20240038510
Publication date
Feb 1, 2024
Samsung Electronics Co., Ltd.
Changheon LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20230317418
Publication date
Oct 5, 2023
Samsung Electronics Co., Ltd.
Jungmin KO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE FOR RADICAL DIAGNOSTIC IN PLASMA PROCESSING CHAMBER, RADICAL...
Publication number
20230197423
Publication date
Jun 22, 2023
Samsung Electronics Co., Ltd.
Sungyong LIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
Publication number
20230143049
Publication date
May 11, 2023
Samsung Electronics Co., Ltd.
Seunghan Baek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
UPPER ELECTRODE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
Publication number
20230123891
Publication date
Apr 20, 2023
Samsung Electronics Co., Ltd.
Byungjo KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA GENERATOR, PLASMA PROCESSING DEVICE, AND METHOD OF MANUFACTU...
Publication number
20230117953
Publication date
Apr 20, 2023
Samsung Electronics Co., Ltd.
Sejin OH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR ARCING DIAGNOSIS, PLASMA PROCESS EQUIPMENT INCLUDING...
Publication number
20230109672
Publication date
Apr 13, 2023
Samsung Electronics Co., Ltd.
Changsoon Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE FOR MEASURING DENSITY OF PLASMA, PLASMA PROCESSING SYSTEM, A...
Publication number
20230102201
Publication date
Mar 30, 2023
Samsung Electronics Co., Ltd.
Vladimir Vsevolodovich PROTOPOPOV
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM OF SEMICONDUCTOR PROCESS AND CONTROL METHOD THEREOF
Publication number
20230005723
Publication date
Jan 5, 2023
Samsung Electronics Co., Ltd.
YOUNGDO KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF CLEANING COLLECTOR OF EUV LIGHT SOURCE SYSTEM
Publication number
20220308339
Publication date
Sep 29, 2022
Samsung Electronics Co., Ltd.
Changsoon LIM
B08 - CLEANING
Information
Patent Application
VARIABLE FREQUENCY AND NON-SINUSOIDAL POWER GENERATOR USING DOUBLE...
Publication number
20220262599
Publication date
Aug 18, 2022
Samsung Electronics Co., Ltd.
Hyunbae KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF PROCESSING SUBSTRATES AND APPARATUSES THEREOF
Publication number
20220139714
Publication date
May 5, 2022
Samsung Electronics Co., Ltd.
Changheon LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
UPPER ELECTRODE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
Publication number
20220051877
Publication date
Feb 17, 2022
Samsung Electronics Co., Ltd.
Byungjo KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20210384012
Publication date
Dec 9, 2021
Samsung Electronics Co., Ltd.
Jinhyuk CHOI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM GENERATOR, PLASMA PROCESSING APPARATUS HAVING THE SAM...
Publication number
20210110997
Publication date
Apr 15, 2021
Samsung Electronics Co., Ltd.
Dongkyu SHIN
H01 - BASIC ELECTRIC ELEMENTS