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Sangpyoung Jeon
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Suwon-si, KR
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Patents Grants
last 30 patents
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Patent Grant
Plasma monitoring device using a cylindrical hollow electrode
Patent number
8,767,203
Issue date
Jul 1, 2014
Samsung Electronics Co., Ltd.
Se-Yeon Kim
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
Plasma Generating Units and Process Monitoring Devices and Semicond...
Publication number
20120062887
Publication date
Mar 15, 2012
Se-Yeon Kim
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR