Sanjay Govindjee

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Staefa, CH

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Patents Grantslast 30 patents

Information Patent Grant
Integrated MEMS metrology device using complementary measuring combs
- Patent number 8,079,246
- Issue date Dec 20, 2011
- The Regents of the University of California
- David Garmire
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATED MEMS METROLOGY DEVICE USING COMPLEMENTARY MEASURING COMBS
- Publication number 20090322365
- Publication date Dec 31, 2009
- Regents of the University of California
- David Garmire
- B81 - MICRO-STRUCTURAL TECHNOLOGY