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Sanjay Kapasi
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Austin, TX, US
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last 30 patents
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Patent Grant
Process-sensitive metrology systems and methods
Patent number
10,216,096
Issue date
Feb 26, 2019
KLA-Tencor Corporation
Myungjun Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Model-based hot spot monitoring
Patent number
10,030,965
Issue date
Jul 24, 2018
KLA-Tencor Corporation
Stilian Ivanov Pandev
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Process-Sensitive Metrology Systems and Methods
Publication number
20170045826
Publication date
Feb 16, 2017
KLA-Tencor Corporation
Myungjun Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Model-Based Hot Spot Monitoring
Publication number
20160327605
Publication date
Nov 10, 2016
KLA-Tencor Corporation
Stilian Ivanov Pandev
G01 - MEASURING TESTING