Sanjay Yedur

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Determining one or more profile parameters of a photomask covered b...
- Patent number 7,702,471
- Issue date Apr 20, 2010
- Tokyo Electron Limited
- Shifang Li
- G01 - MEASURING TESTING
Information Patent Grant
Determining transmittance of a photomask using optical metrology
- Patent number 7,639,375
- Issue date Dec 29, 2009
- Tokyo Electron Limited
- Sanjay Yedur
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Evaluating a profile model to characterize a structure to be examin...
- Patent number 7,518,740
- Issue date Apr 14, 2009
- Tokyo Electron Limited
- Jeffrey A. Chard
- G01 - MEASURING TESTING
Information Patent Grant
Automated process control using parameters determined from a photom...
- Patent number 7,480,062
- Issue date Jan 20, 2009
- Tokyo Electron Limited
- Shifang Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Selecting a hypothetical profile to use in optical metrology
- Patent number 7,394,554
- Issue date Jul 1, 2008
- Timbre Technologies, Inc.
- Vi Vuong
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DETERMINING ONE OR MORE PROFILE PARAMETERS OF A PHOTOMASK COVERED B...
- Publication number 20080291467
- Publication date Nov 27, 2008
- TOKYO ELECTRON LIMITED
- SHIFANG LI
- G01 - MEASURING TESTING
Information Patent Application
AUTOMATED PROCESS CONTROL USING PARAMETERS DETERMINED FROM A PHOTOM...
- Publication number 20080291429
- Publication date Nov 27, 2008
- TOKYO ELECTRON LIMITED
- SHIFANG LI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Determining transmittance of a photomask using optical metrology
- Publication number 20080144919
- Publication date Jun 19, 2008
- TOKYO ELECTRON LIMITED
- Sanjay Yedur
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Evaluating a profile model to characterize a structure to be examin...
- Publication number 20080007738
- Publication date Jan 10, 2008
- TOKYO ELECTRON LIMITED
- Jeffrey A. Chard
- G01 - MEASURING TESTING
Information Patent Application
Selecting a hypothetical profile to use in optical metrology
- Publication number 20050057748
- Publication date Mar 17, 2005
- TimbreTechnologies, Inc.
- Vi Vuong
- G01 - MEASURING TESTING