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Sanjeev Seshagiri
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San Diego, CA, US
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last 30 patents
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Patent Grant
Method of and apparatus for supply and recovery of target material
Patent number
9,699,876
Issue date
Jul 4, 2017
ASML Netherlands, B.V.
Georgiy Vaschenko
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
METHOD OF AND APPARATUS FOR SUPPLY AND RECOVERY OF TARGET MATERIAL
Publication number
20140261761
Publication date
Sep 18, 2014
Georgiy VASCHENKO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR