Sanjeev Tandon

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Silicon nitride film with stress control
- Patent number 7,488,690
- Issue date Feb 10, 2009
- Applied Materials, Inc.
- R. Suryanarayanan Iyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for silicon based dielectric chemical vapor deposition
- Patent number 7,473,655
- Issue date Jan 6, 2009
- Applied Materials, Inc.
- Yaxin Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of fabricating a silicon nitride stack
- Patent number 7,465,669
- Issue date Dec 16, 2008
- Applied Materials, Inc.
- R. Suryanarayanan Iyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for fabricating controlled stress silicon nitride films
- Patent number 7,416,995
- Issue date Aug 26, 2008
- Applied Materials, Inc.
- R. Suryanarayanan Iyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for silicon nitride chemical vapor deposition
- Patent number 7,365,029
- Issue date Apr 29, 2008
- Applied Materials, Inc.
- R. Suryanarayanan Iyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for fabricating silicon nitride spacer structures
- Patent number 7,294,581
- Issue date Nov 13, 2007
- Applied Materials, Inc.
- R. Suryanarayanan Iyer
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR SILICON BASED DIELECTRIC CHEMICAL VAPOR DEPOSITION
- Publication number 20090111284
- Publication date Apr 30, 2009
- Yaxin Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSORS AND HARDWARE FOR CVD AND ALD
- Publication number 20080063798
- Publication date Mar 13, 2008
- Shreyas S. Kher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for fabricating controlled stress silicon nitride films
- Publication number 20070111546
- Publication date May 17, 2007
- APPLIED MATERIALS, INC.
- R. Suryanarayanan Iyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of fabricating a silicon nitride stack
- Publication number 20070111538
- Publication date May 17, 2007
- APPLIED MATERIALS, INC.
- R. Suryanarayanan Iyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for fabricating silicon nitride spacer structures
- Publication number 20070087575
- Publication date Apr 19, 2007
- APPLIED MATERIALS, INC.
- R. Suryanarayanan Iyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for silicon based dielectric chemical vapor deposition
- Publication number 20060286818
- Publication date Dec 21, 2006
- Yaxin Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Silicon nitride film with stress control
- Publication number 20060009041
- Publication date Jan 12, 2006
- R. Suryanarayanan Iyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for silicon nitride chemical vapor deposition
- Publication number 20050255714
- Publication date Nov 17, 2005
- APPLIED MATERIALS, INC.
- R. Suryanarayanan Iyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Thermal chemical vapor deposition of silicon nitride using BTBAS bi...
- Publication number 20050109276
- Publication date May 26, 2005
- APPLIED MATERIALS, INC.
- R. Suryanarayanan Iyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Sanjeev Tandon

Person

Patents Grantslast 30 patents

Silicon nitride film with stress control

Method for silicon based dielectric chemical vapor deposition

Method of fabricating a silicon nitride stack

Method for fabricating controlled stress silicon nitride films

Method for silicon nitride chemical vapor deposition

Method for fabricating silicon nitride spacer structures

Patents Applicationslast 30 patents

METHOD FOR SILICON BASED DIELECTRIC CHEMICAL VAPOR DEPOSITION

PRECURSORS AND HARDWARE FOR CVD AND ALD

Method for fabricating controlled stress silicon nitride films

Method of fabricating a silicon nitride stack

Method for fabricating silicon nitride spacer structures

Method for silicon based dielectric chemical vapor deposition

Silicon nitride film with stress control

Method for silicon nitride chemical vapor deposition

Thermal chemical vapor deposition of silicon nitride using BTBAS bi...