Sarah A. Kay

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Jefferson City, TN, US

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Patents Grantslast 30 patents

Information Patent Grant
Metrology tool error log analysis methodology and system
- Patent number 7,187,993
- Issue date Mar 6, 2007
- International Business Machines Corporation
- Sarah A. Kay
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Metrology tool error log analysis methodology and system
- Patent number 7,065,425
- Issue date Jun 20, 2006
- Internaitonal Business Machines Corporation
- Sarah A. Kay
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

Information Patent Application
Metrology tool error log analysis methodology and system
- Publication number 20060293778
- Publication date Dec 28, 2006
- International Business Machines Corporation
- Sarah A. Kay
- G05 - CONTROLLING REGULATING