Sarath BABU

Person

  • Singapore, RS

Patents Applicationslast 30 patents

  • Information Patent Application

    Electrostatic Chuck

    • Publication number 20240266200
    • Publication date Aug 8, 2024
    • Applied Materials, Inc.
    • Sarath BABU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SPRAY-COATED ELECTROSTATIC CHUCK DESIGN

    • Publication number 20240258076
    • Publication date Aug 1, 2024
    • Applied Materials, Inc.
    • Tuck Foong KOH
    • H01 - BASIC ELECTRIC ELEMENTS