Saravanan Paramasivam

Person

Chennai, IN

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for determining defects using physics-based image...
- Patent number 11,676,264
- Issue date Jun 13, 2023
- KLA Corporation
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and systems for inspection of semiconductor structures with...
- Patent number 11,379,967
- Issue date Jul 5, 2022
- KLA Corporation
- Jacob George
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for process monitoring with optical inspections
- Patent number 11,379,969
- Issue date Jul 5, 2022
- KLA Corporation
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Diagnostic methods for the classifiers and the defects captured by...
- Patent number 11,237,119
- Issue date Feb 1, 2022
- KLA-Tencor Corporation
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for difference filter and aperture selection usin...
- Patent number 11,151,707
- Issue date Oct 19, 2021
- KLA Corporation
- Santosh Bhattacharyya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor hot-spot and process-window discovery combining optic...
- Patent number 11,055,840
- Issue date Jul 6, 2021
- KLA Corporation
- Ardis Liang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Care areas for improved electron beam defect detection
- Patent number 10,692,690
- Issue date Jun 23, 2020
- KLA-Tencor Corporation
- Vidyasagar Anantha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mode selection for inspection
- Patent number 10,670,536
- Issue date Jun 2, 2020
- KLA-Tencor Corp.
- Martin Plihal
- G01 - MEASURING TESTING
Information Patent Grant
Optimizing training sets used for setting up inspection-related alg...
- Patent number 10,267,748
- Issue date Apr 23, 2019
- KLA-Tencor Corp.
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for production line monitoring
- Patent number 9,983,148
- Issue date May 29, 2018
- KLA-Tencor Corporation
- Saravanan Paramasivam
- G05 - CONTROLLING REGULATING
Information Patent Grant
Unbiased wafer defect samples
- Patent number 8,948,494
- Issue date Feb 3, 2015
- KLA-Tencor Corp.
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multi-scale classification of defects
- Patent number 8,165,837
- Issue date Apr 24, 2012
- KLA-Tencor Corporation
- Saravanan Paramasivam
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DEEP LEARNING IMAGE DENOISING FOR SEMICONDUCTOR-BASED APPLICATIONS
- Publication number 20220383456
- Publication date Dec 1, 2022
- KLA Corporation
- Aditya Gulati
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Semiconductor Hot-Spot and Process-Window Discovery Combining Optic...
- Publication number 20210042908
- Publication date Feb 11, 2021
- KLA Corporation
- Ardis Liang
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR PROCESS MONITORING WITH OPTICAL INSPECTIONS
- Publication number 20210035282
- Publication date Feb 4, 2021
- KLA Corporation
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and Method for Determining Defects Using Physics-Based Image...
- Publication number 20210027445
- Publication date Jan 28, 2021
- KLA Corporation
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Methods And Systems For Inspection Of Semiconductor Structures With...
- Publication number 20200234428
- Publication date Jul 23, 2020
- KLA Corporation
- Jacob George
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and Method for Difference Filter and Aperture Selection Usin...
- Publication number 20200184628
- Publication date Jun 11, 2020
- KLA-Tencor Corporation
- Santosh Bhattacharyya
- G01 - MEASURING TESTING
Information Patent Application
Mode Selection for Inspection
- Publication number 20190302031
- Publication date Oct 3, 2019
- KLA-Tencor Corporation
- Martin Plihal
- G01 - MEASURING TESTING
Information Patent Application
Care Areas for Improved Electron Beam Defect Detection
- Publication number 20180277337
- Publication date Sep 27, 2018
- KLA-Tencor Corporation
- Vidyasagar Anantha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Diagnostic Methods for the Classifiers and the Defects Captured by...
- Publication number 20180197714
- Publication date Jul 12, 2018
- KLA-Tencor Corporation
- Martin Plihal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optimizing Training Sets Used for Setting Up Inspection-Related Alg...
- Publication number 20180106732
- Publication date Apr 19, 2018
- KLA-Tencor Corporation
- Martin Plihal
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Production Line Monitoring
- Publication number 20160377552
- Publication date Dec 29, 2016
- KLA-Tencor Corporation
- Saravanan Paramasivam
- G01 - MEASURING TESTING
Information Patent Application
Unbiased Wafer Defect Samples
- Publication number 20140133737
- Publication date May 15, 2014
- KLA-Tencor Corporation
- Martin Plihal
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...

Saravanan Paramasivam

Person

Patents Grantslast 30 patents

System and method for determining defects using physics-based image...

Methods and systems for inspection of semiconductor structures with...

Method for process monitoring with optical inspections

Diagnostic methods for the classifiers and the defects captured by...

System and method for difference filter and aperture selection usin...

Semiconductor hot-spot and process-window discovery combining optic...

Care areas for improved electron beam defect detection

Mode selection for inspection

Optimizing training sets used for setting up inspection-related alg...

System and method for production line monitoring

Unbiased wafer defect samples

Multi-scale classification of defects

Patents Applicationslast 30 patents

DEEP LEARNING IMAGE DENOISING FOR SEMICONDUCTOR-BASED APPLICATIONS

Semiconductor Hot-Spot and Process-Window Discovery Combining Optic...

METHOD FOR PROCESS MONITORING WITH OPTICAL INSPECTIONS

System and Method for Determining Defects Using Physics-Based Image...

Methods And Systems For Inspection Of Semiconductor Structures With...

System and Method for Difference Filter and Aperture Selection Usin...

Mode Selection for Inspection

Care Areas for Improved Electron Beam Defect Detection

Diagnostic Methods for the Classifiers and the Defects Captured by...

Optimizing Training Sets Used for Setting Up Inspection-Related Alg...

System and Method for Production Line Monitoring

Unbiased Wafer Defect Samples