Saravjeet Singh

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-zone gas distribution systems and methods
- Patent number 12,148,597
- Issue date Nov 19, 2024
- Applied Materials, Inc.
- Saravjeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer dicing using femtosecond-based laser and plasma etch
- Patent number 12,131,952
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Wei-Sheng Lei
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Two piece electrode assembly with gap for plasma control
- Patent number 11,915,911
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Tien Fak Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic showerheads with conductive electrodes
- Patent number 11,834,744
- Issue date Dec 5, 2023
- Applied Materials, Inc.
- Laksheswar Kalita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems to enhance process uniformity
- Patent number 11,637,002
- Issue date Apr 25, 2023
- Applied Materials, Inc.
- Saravjeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer dicing using femtosecond-based laser and plasma etch
- Patent number 11,621,194
- Issue date Apr 4, 2023
- Applied Materials, Inc.
- Wei-Sheng Lei
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Ceramic showerheads with conductive electrodes
- Patent number 11,591,693
- Issue date Feb 28, 2023
- Applied Materials, Inc.
- Laksheswar Kalita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-zone gas distribution systems and methods
- Patent number 11,581,165
- Issue date Feb 14, 2023
- Applied Materials, Inc.
- Saravjeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems to enhance process uniformity
- Patent number 11,239,061
- Issue date Feb 1, 2022
- Applied Materials, Inc.
- Saravjeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic showerheads with conductive electrodes
- Patent number 10,920,319
- Issue date Feb 16, 2021
- Applied Materials, Inc.
- Laksheswar Kalita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer dicing using femtosecond-based laser and plasma etch
- Patent number 10,910,271
- Issue date Feb 2, 2021
- Applied Materials, Inc.
- Wei-Sheng Lei
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Multi-zone gas distribution systems and methods
- Patent number 10,903,054
- Issue date Jan 26, 2021
- Applied Materials, Inc.
- Saravjeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for improved performance in semiconductor proce...
- Patent number 10,892,198
- Issue date Jan 12, 2021
- Applied Materials, Inc.
- Chirantha P. Rodrigo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-plate faceplate for a processing chamber
- Patent number 10,811,232
- Issue date Oct 20, 2020
- Applied Materials, Inc.
- Deepak Doddabelavangala Srikantaiah
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Wafer dicing using femtosecond-based laser and plasma etch
- Patent number 10,714,390
- Issue date Jul 14, 2020
- Applied Materials, Inc.
- Wei-Sheng Lei
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Two piece electrode assembly with gap for plasma control
- Patent number 10,699,879
- Issue date Jun 30, 2020
- Applied Materials, Inc.
- Tien Fak Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer dicing using femtosecond-based laser and plasma etch
- Patent number 10,566,238
- Issue date Feb 18, 2020
- Applied Materials, Inc.
- Wei-Sheng Lei
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and methods for dry etch with edge, side and back protection
- Patent number 10,170,277
- Issue date Jan 1, 2019
- Applied Materials, Inc.
- Saravjeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer dicing using femtosecond-based laser and plasma etch
- Patent number 10,163,713
- Issue date Dec 25, 2018
- Applied Materials, Inc.
- Wei-Sheng Lei
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Direct lift process apparatus
- Patent number 9,978,632
- Issue date May 22, 2018
- Applied Materials, Inc.
- Khiem Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrodes for etch
- Patent number 9,754,765
- Issue date Sep 5, 2017
- Applied Materials, Inc.
- Banqiu Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas distribution apparatus for directional and proportional deliver...
- Patent number 9,488,315
- Issue date Nov 8, 2016
- Applied Materials, Inc.
- Roy C. Nangoy
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Method and apparatus for fast gas exchange, fast gas switching, and...
- Patent number 9,305,810
- Issue date Apr 5, 2016
- Applied Materials, Inc.
- Saravjeet Singh
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Dynamic ion radical sieve and ion radical aperture for an inductive...
- Patent number 9,287,093
- Issue date Mar 15, 2016
- Applied Materials, Inc.
- Saravjeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Water soluble mask for substrate dicing by laser and plasma etch
- Patent number 9,263,308
- Issue date Feb 16, 2016
- Applied Materials, Inc.
- Wei-Sheng Lei
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wafer dicing using femtosecond-based laser and plasma etch
- Patent number 9,245,802
- Issue date Jan 26, 2016
- Applied Materials, Inc.
- Wei-Sheng Lei
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wafer dicing with etch chamber shield ring for film frame wafer app...
- Patent number 9,236,305
- Issue date Jan 12, 2016
- Applied Materials, Inc.
- Wei-Sheng Lei
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser and plasma etch wafer dicing using water-soluble die attach film
- Patent number 9,224,625
- Issue date Dec 29, 2015
- Applied Materials, Inc.
- Wei-Sheng Lei
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Hybrid laser and plasma etch wafer dicing using substrate carrier
- Patent number 9,218,992
- Issue date Dec 22, 2015
- Applied Materials, Inc.
- Saravjeet Singh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wafer dicing using pulse train laser with multiple-pulse bursts and...
- Patent number 9,129,904
- Issue date Sep 8, 2015
- Applied Materials, Inc.
- Wei-Sheng Lei
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
CERAMIC SHOWERHEADS WITH CONDUCTIVE ELECTRODES
- Publication number 20230203657
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Laksheswar Kalita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER DICING USING FEMTOSECOND-BASED LASER AND PLASMA ETCH
- Publication number 20230207393
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Wei-Sheng Lei
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MULTI-ZONE GAS DISTRIBUTION SYSTEMS AND METHODS
- Publication number 20230197416
- Publication date Jun 22, 2023
- Applied Materials, Inc.
- Saravjeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ZONE GAS DISTRIBUTION SYSTEMS AND METHODS
- Publication number 20210265134
- Publication date Aug 26, 2021
- Applied Materials, Inc.
- Saravjeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC SHOWERHEADS WITH CONDUCTIVE ELECTRODES
- Publication number 20210189564
- Publication date Jun 24, 2021
- Applied Materials, Inc.
- Laksheswar Kalita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER DICING USING FEMTOSECOND-BASED LASER AND PLASMA ETCH
- Publication number 20210134676
- Publication date May 6, 2021
- Applied Materials, Inc.
- Wei-Sheng Lei
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
TWO PIECE ELECTRODE ASSEMBLY WITH GAP FOR PLASMA CONTROL
- Publication number 20200328065
- Publication date Oct 15, 2020
- Applied Materials, Inc.
- Tien Fak Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER DICING USING FEMTOSECOND-BASED LASER AND PLASMA ETCH
- Publication number 20200286787
- Publication date Sep 10, 2020
- Applied Materials, Inc.
- Wei-Sheng Lei
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CERAMIC SHOWERHEADS WITH CONDUCTIVE ELECTRODES
- Publication number 20200224313
- Publication date Jul 16, 2020
- Applied Materials, Inc.
- Laksheswar Kalita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER DICING USING FEMTOSECOND-BASED LASER AND PLASMA ETCH
- Publication number 20200118880
- Publication date Apr 16, 2020
- Applied Materials, Inc.
- Wei-Sheng Lei
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEMS AND METHODS FOR IMPROVED PERFORMANCE IN SEMICONDUCTOR PROCE...
- Publication number 20200091018
- Publication date Mar 19, 2020
- Applied Materials, Inc.
- Chirantha P. Rodrigo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE CHANNEL SHOWERHEADS
- Publication number 20200087788
- Publication date Mar 19, 2020
- Applied Materials, Inc.
- Tien Fak Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TWO PIECE ELECTRODE ASSEMBLY WITH GAP FOR PLASMA CONTROL
- Publication number 20190318911
- Publication date Oct 17, 2019
- Applied Materials, Inc.
- Tien Fak Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CHAMBER COATINGS AND PROCESSES
- Publication number 20190304756
- Publication date Oct 3, 2019
- Applied Materials, Inc.
- Laksheswar Kalita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-ZONE GAS DISTRIBUTION SYSTEMS AND METHODS
- Publication number 20190189401
- Publication date Jun 20, 2019
- Applied Materials, Inc.
- Saravjeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR DRY ETCH WITH EDGE, SIDE AND BACK PROTECTION
- Publication number 20190096634
- Publication date Mar 28, 2019
- Applied Materials, Inc.
- Saravjeet SINGH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER DICING USING FEMTOSECOND-BASED LASER AND PLASMA ETCH
- Publication number 20190088549
- Publication date Mar 21, 2019
- Applied Materials, Inc.
- Wei-Sheng Lei
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MULTI-PLATE FACEPLATE FOR A PROCESSING CHAMBER
- Publication number 20190051499
- Publication date Feb 14, 2019
- Applied Materials, Inc.
- Deepak Doddabelavangala SRIKANTAIAH
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
APPARATUS AND METHOD TO REDUCE PARTICLE FORMATION ON SUBSTRATES IN...
- Publication number 20180254203
- Publication date Sep 6, 2018
- Applied Materials, Inc.
- Saravjeet SINGH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS TO ENHANCE PROCESS UNIFORMITY
- Publication number 20170229291
- Publication date Aug 10, 2017
- Applied Materials, Inc.
- Saravjeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DYNAMIC ION RADICAL SIEVE AND ION RADICAL APERTURE FOR AN INDUCTIVE...
- Publication number 20160181067
- Publication date Jun 23, 2016
- Applied Materials, Inc.
- Saravjeet SINGH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS TO ENHANCE PROCESS UNIFORMITY
- Publication number 20160148821
- Publication date May 26, 2016
- Applied Materials, Inc.
- Saravjeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER DICING USING FEMTOSECOND-BASED LASER AND PLASMA ETCH
- Publication number 20160141210
- Publication date May 19, 2016
- Wei-Sheng Lei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIRECT LIFT PROCESS APPARATUS
- Publication number 20150364347
- Publication date Dec 17, 2015
- Applied Materials, Inc.
- Khiem NGUYEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER SCRIBING AND PLASMA ETCH FOR HIGH DIE BREAK STRENGTH AND CLEA...
- Publication number 20150200119
- Publication date Jul 16, 2015
- Brad EATON
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD OF DICED WAFER TRANSPORTATION
- Publication number 20150102467
- Publication date Apr 16, 2015
- Wei-Sheng Lei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NOVEL ELECTRODES FOR ETCH
- Publication number 20150090401
- Publication date Apr 2, 2015
- Banqiu Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER DICING USING FEMTOSECOND-BASED LASER AND PLASMA ETCH
- Publication number 20140367041
- Publication date Dec 18, 2014
- Wei-Sheng Lei
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER, PLASMA ETCH, AND BACKSIDE GRIND PROCESS FOR WAFER DICING
- Publication number 20140363952
- Publication date Dec 11, 2014
- Wei-Sheng LEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DISTRIBUTION APPARATUS FOR DIRECTIONAL AND PROPORTIONAL DELIVER...
- Publication number 20140261805
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- Roy C. Nangoy
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS

Saravjeet Singh

Person

Patents Grantslast 30 patents

Multi-zone gas distribution systems and methods

Wafer dicing using femtosecond-based laser and plasma etch

Two piece electrode assembly with gap for plasma control

Ceramic showerheads with conductive electrodes

Methods and systems to enhance process uniformity

Wafer dicing using femtosecond-based laser and plasma etch

Ceramic showerheads with conductive electrodes

Multi-zone gas distribution systems and methods

Methods and systems to enhance process uniformity

Ceramic showerheads with conductive electrodes

Wafer dicing using femtosecond-based laser and plasma etch

Multi-zone gas distribution systems and methods

Systems and methods for improved performance in semiconductor proce...

Multi-plate faceplate for a processing chamber

Wafer dicing using femtosecond-based laser and plasma etch

Two piece electrode assembly with gap for plasma control

Wafer dicing using femtosecond-based laser and plasma etch

Apparatus and methods for dry etch with edge, side and back protection

Wafer dicing using femtosecond-based laser and plasma etch

Direct lift process apparatus

Electrodes for etch

Gas distribution apparatus for directional and proportional deliver...

Method and apparatus for fast gas exchange, fast gas switching, and...

Dynamic ion radical sieve and ion radical aperture for an inductive...

Water soluble mask for substrate dicing by laser and plasma etch

Wafer dicing using femtosecond-based laser and plasma etch

Wafer dicing with etch chamber shield ring for film frame wafer app...

Laser and plasma etch wafer dicing using water-soluble die attach film

Hybrid laser and plasma etch wafer dicing using substrate carrier

Wafer dicing using pulse train laser with multiple-pulse bursts and...

Patents Applicationslast 30 patents

CERAMIC SHOWERHEADS WITH CONDUCTIVE ELECTRODES

WAFER DICING USING FEMTOSECOND-BASED LASER AND PLASMA ETCH

MULTI-ZONE GAS DISTRIBUTION SYSTEMS AND METHODS

MULTI-ZONE GAS DISTRIBUTION SYSTEMS AND METHODS

CERAMIC SHOWERHEADS WITH CONDUCTIVE ELECTRODES

WAFER DICING USING FEMTOSECOND-BASED LASER AND PLASMA ETCH

TWO PIECE ELECTRODE ASSEMBLY WITH GAP FOR PLASMA CONTROL

WAFER DICING USING FEMTOSECOND-BASED LASER AND PLASMA ETCH

CERAMIC SHOWERHEADS WITH CONDUCTIVE ELECTRODES

WAFER DICING USING FEMTOSECOND-BASED LASER AND PLASMA ETCH

SYSTEMS AND METHODS FOR IMPROVED PERFORMANCE IN SEMICONDUCTOR PROCE...

MULTIPLE CHANNEL SHOWERHEADS

TWO PIECE ELECTRODE ASSEMBLY WITH GAP FOR PLASMA CONTROL

SEMICONDUCTOR CHAMBER COATINGS AND PROCESSES

MULTI-ZONE GAS DISTRIBUTION SYSTEMS AND METHODS

APPARATUS AND METHODS FOR DRY ETCH WITH EDGE, SIDE AND BACK PROTECTION

WAFER DICING USING FEMTOSECOND-BASED LASER AND PLASMA ETCH

MULTI-PLATE FACEPLATE FOR A PROCESSING CHAMBER

APPARATUS AND METHOD TO REDUCE PARTICLE FORMATION ON SUBSTRATES IN...

METHODS AND SYSTEMS TO ENHANCE PROCESS UNIFORMITY

DYNAMIC ION RADICAL SIEVE AND ION RADICAL APERTURE FOR AN INDUCTIVE...

METHODS AND SYSTEMS TO ENHANCE PROCESS UNIFORMITY

WAFER DICING USING FEMTOSECOND-BASED LASER AND PLASMA ETCH

DIRECT LIFT PROCESS APPARATUS

LASER SCRIBING AND PLASMA ETCH FOR HIGH DIE BREAK STRENGTH AND CLEA...

METHOD OF DICED WAFER TRANSPORTATION

NOVEL ELECTRODES FOR ETCH

WAFER DICING USING FEMTOSECOND-BASED LASER AND PLASMA ETCH

LASER, PLASMA ETCH, AND BACKSIDE GRIND PROCESS FOR WAFER DICING

GAS DISTRIBUTION APPARATUS FOR DIRECTIONAL AND PROPORTIONAL DELIVER...