Sascha Perlitz

Person

Jena, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for characterizing a microlithographic mask
- Patent number 11,914,303
- Issue date Feb 27, 2024
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for three-dimensionally measuring a 3D aerial image of a lit...
- Patent number 10,634,886
- Issue date Apr 28, 2020
- Carl Zeiss SMT GmbH
- Ulrich Matejka
- G02 - OPTICS
Information Patent Grant
Method for three-dimensionally measuring a 3D aerial image of a lit...
- Patent number 10,068,325
- Issue date Sep 4, 2018
- Carl Zeiss SMT GmbH
- Ulrich Matejka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for characterizing a structure on a mask and device for carr...
- Patent number 9,605,946
- Issue date Mar 28, 2017
- Carl Zeiss SMT GmbH
- Sascha Perlitz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Grating-assisted autofocus device and autofocusing method for an im...
- Patent number 9,297,994
- Issue date Mar 29, 2016
- Carl Zeiss SMS GmbH
- Sascha Perlitz
- G02 - OPTICS
Information Patent Grant
Method for characterizing a structure on a mask and device for carr...
- Patent number 9,213,003
- Issue date Dec 15, 2015
- Carl Zeiss SMS GmbH
- Sascha Perlitz
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK
- Publication number 20240152057
- Publication date May 9, 2024
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR CHARACTERIZATION OF A MICROLITHOGRAPHY MASK
- Publication number 20240061328
- Publication date Feb 22, 2024
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL SYSTEM, IN PARTICULAR FOR CHARACTERIZING A MICROLITHOGRAPHY...
- Publication number 20230221571
- Publication date Jul 13, 2023
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G02 - OPTICS
Information Patent Application
APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK
- Publication number 20210397099
- Publication date Dec 23, 2021
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR THREE-DIMENSIONALLY MEASURING A 3D AERIAL IMAGE OF A LIT...
- Publication number 20180357758
- Publication date Dec 13, 2018
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR THREE-DIMENSIONALLY MEASURING A 3D AERIAL IMAGE OF A LIT...
- Publication number 20170132782
- Publication date May 11, 2017
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G02 - OPTICS
Information Patent Application
METHOD FOR CHARACTERIZING A STRUCTURE ON A MASK AND DEVICE FOR CARR...
- Publication number 20160091300
- Publication date Mar 31, 2016
- Carl Zeiss SMT GMBH
- Sascha Perlitz
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR CHARACTERIZING A STRUCTURE ON A MASK AND DEVICE FOR CARR...
- Publication number 20130308125
- Publication date Nov 21, 2013
- CARL ZEISS SMS GMBH
- Sascha Perlitz
- G01 - MEASURING TESTING
Information Patent Application
Autofocus Device and Autofocussing Method For An Imaging Device
- Publication number 20130062501
- Publication date Mar 14, 2013
- CARL ZEISS SMT GMBH
- Sascha Perlitz
- G02 - OPTICS

Sascha Perlitz

Person

Patents Grantslast 30 patents

Apparatus and method for characterizing a microlithographic mask

Method for three-dimensionally measuring a 3D aerial image of a lit...

Method for three-dimensionally measuring a 3D aerial image of a lit...

Method for characterizing a structure on a mask and device for carr...

Grating-assisted autofocus device and autofocusing method for an im...

Method for characterizing a structure on a mask and device for carr...

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK

METHOD AND APPARATUS FOR CHARACTERIZATION OF A MICROLITHOGRAPHY MASK

OPTICAL SYSTEM, IN PARTICULAR FOR CHARACTERIZING A MICROLITHOGRAPHY...

APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK

METHOD FOR THREE-DIMENSIONALLY MEASURING A 3D AERIAL IMAGE OF A LIT...

METHOD FOR THREE-DIMENSIONALLY MEASURING A 3D AERIAL IMAGE OF A LIT...

METHOD FOR CHARACTERIZING A STRUCTURE ON A MASK AND DEVICE FOR CARR...

METHOD FOR CHARACTERIZING A STRUCTURE ON A MASK AND DEVICE FOR CARR...

Autofocus Device and Autofocussing Method For An Imaging Device