Sassan Roham

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San Ramon, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Gas exhaust by-product measurement system
- Patent number 10,302,553
- Issue date May 28, 2019
- Lam Research Corporation
- Cristian Siladie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pedestal heat transfer and temperature control
- Patent number 7,941,039
- Issue date May 10, 2011
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cast pedestal with heating element and coaxial heat exchanger
- Patent number 7,327,948
- Issue date Feb 5, 2008
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
GENERATING DIGITAL TWINS OF SEMICONDUCTOR MANUFACTURING EQUIPMENT
- Publication number 20240378347
- Publication date Nov 14, 2024
- LAM RESEARCH CORPORATION
- Sassan Roham
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LOCALIZED PLASMA ARC PREVENTION VIA PURGE RING
- Publication number 20230402259
- Publication date Dec 14, 2023
- LAM RESEARCH CORPORATION
- Karl Frederick Leeser
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PREDICTIVE MAINTENANCE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
- Publication number 20230400847
- Publication date Dec 14, 2023
- LAM RESEARCH CORPORATION
- Jian Guo
- G05 - CONTROLLING REGULATING
Information Patent Application
PERFORMANCE PREDICTORS FOR SEMICONDUCTOR-MANUFACTURING PROCESSES
- Publication number 20230049157
- Publication date Feb 16, 2023
- LAM RESEARCH CORPORATION
- Kapil Umesh Sawlani
- G05 - CONTROLLING REGULATING
Information Patent Application
GAS EXHAUST BY-PRODUCT MEASUREMENT SYSTEM
- Publication number 20190064057
- Publication date Feb 28, 2019
- LAM RESEARCH CORPORATION
- Cristian SILADIE
- G01 - MEASURING TESTING