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Satej Subhash KHEDEKAR
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Method of processing data, method of obtaining calibration data
Patent number
11,506,566
Issue date
Nov 22, 2022
ASML Netherlands B.V.
Mariya Vyacheslavivna Medvedyeva
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
METHOD FOR ADJUSTING A PATTERNING PROCESS
Publication number
20230273529
Publication date
Aug 31, 2023
ASML NETHERLANDS B.V.
Satej Subhash KHEDEKAR
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
METHOD OF PROCESSING DATA, METHOD OF OBTAINING CALIBRATION DATA
Publication number
20190204180
Publication date
Jul 4, 2019
ASML NETHERLANDS B.V.
Mariya Vyacheslavivna MEDVEDYEVA
G01 - MEASURING TESTING