Satheesh KUPPURAO

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Upper dome with injection assembly
- Patent number 10,458,040
- Issue date Oct 29, 2019
- Applied Materials, Inc.
- Paul Brillhart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for titanium silicide formation using TiCl4 precursor and s...
- Patent number 10,312,096
- Issue date Jun 4, 2019
- Applied Materials, Inc.
- Hua Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Absorbing reflector for semiconductor processing chamber
- Patent number 10,306,708
- Issue date May 28, 2019
- Applied Materials, Inc.
- Kin Pong Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-aligned process for sub-10nm fin formation
- Patent number 10,224,421
- Issue date Mar 5, 2019
- Applied Materials, Inc.
- Zhiyuan Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system with lamphead having temperature manage...
- Patent number 10,202,707
- Issue date Feb 12, 2019
- Applied Materials, Inc.
- Joseph M. Ranish
- F21 - LIGHTING
Information Patent Grant
EPI base ring
- Patent number 10,119,192
- Issue date Nov 6, 2018
- Applied Materials, Inc.
- Steve Aboagye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multizone control of lamps in a conical lamphead using pyrometers
- Patent number 10,077,508
- Issue date Sep 18, 2018
- Applied Materials, Inc.
- Joseph M. Ranish
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber having separate process gas and purge gas regions
- Patent number 9,870,919
- Issue date Jan 16, 2018
- Applied Materials, Inc.
- Joseph M. Ranish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Upper dome with injection assembly
- Patent number 9,845,550
- Issue date Dec 19, 2017
- Applied Materials, Inc.
- Paul Brillhart
- C30 - CRYSTAL GROWTH
Information Patent Grant
Absorbing lamphead face
- Patent number 9,842,753
- Issue date Dec 12, 2017
- Applied Materials, Inc.
- Paul Brillhart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Absorbing reflector for semiconductor processing chamber
- Patent number 9,832,816
- Issue date Nov 28, 2017
- Applied Materials, Inc.
- Kin Pong Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quartz upper and lower domes
- Patent number 9,768,043
- Issue date Sep 19, 2017
- Applied Materials, Inc.
- Anzhong Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multizone control of lamps in a conical lamphead using pyrometers
- Patent number 9,580,835
- Issue date Feb 28, 2017
- Applied Materials, Inc.
- Joseph M. Ranish
- C30 - CRYSTAL GROWTH
Information Patent Grant
Semiconductor substrate processing system
- Patent number 9,512,520
- Issue date Dec 6, 2016
- Applied Materials, Inc.
- Errol Antonio C. Sanchez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
EPI base ring
- Patent number 9,322,097
- Issue date Apr 26, 2016
- Applied Materials, Inc.
- Steve Aboagye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multizone control of lamps in a conical lamphead using pyrometers
- Patent number 9,230,837
- Issue date Jan 5, 2016
- Applied Materials, Inc.
- Joseph M. Ranish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing layers having reduced interfacial contamination
- Patent number 9,058,988
- Issue date Jun 16, 2015
- Applied Materials, Inc.
- Jean R. Vatus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus to control semiconductor film deposition characteristics
- Patent number 8,991,332
- Issue date Mar 31, 2015
- Applied Materials, Inc.
- Satheesh Kuppurao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for insitu analysis of gases in electronic de...
- Patent number 8,813,538
- Issue date Aug 26, 2014
- Applied Materials, Inc.
- David K. Carlson
- G01 - MEASURING TESTING
Information Patent Grant
Multizone control of lamps in a conical lamphead using pyrometers
- Patent number 8,772,055
- Issue date Jul 8, 2014
- Applied Materials, Inc.
- Joseph M. Ranish
- G01 - MEASURING TESTING
Information Patent Grant
Method of removing contaminants and native oxides from a substrate...
- Patent number 8,728,944
- Issue date May 20, 2014
- Applied Material, Inc.
- Satheesh Kuppurao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Independent radiant gas preheating for precursor disassociation con...
- Patent number 8,663,390
- Issue date Mar 4, 2014
- Applied Materials, Inc.
- David Keith Carlson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for chemical vapor deposition
- Patent number 8,313,804
- Issue date Nov 20, 2012
- Applied Materials, Inc.
- David K. Carlson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for insitu analysis of gases in electronic de...
- Patent number 8,020,427
- Issue date Sep 20, 2011
- Applied Materials, Inc.
- David K. Carlson
- G01 - MEASURING TESTING
Information Patent Grant
Independent radiant gas preheating for precursor disassociation con...
- Patent number 7,976,634
- Issue date Jul 12, 2011
- Applied Materials, Inc.
- David Keith Carlson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for chemical vapor deposition
- Patent number 7,967,911
- Issue date Jun 28, 2011
- Applied Materials, Inc.
- David K. Carlson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Elimination of flow and pressure gradients in low utilization proce...
- Patent number 7,955,646
- Issue date Jun 7, 2011
- Applied Materials, Inc.
- James P. Cruse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for insitu analysis of gases in electronic de...
- Patent number 7,770,431
- Issue date Aug 10, 2010
- Applied Materials, Inc.
- David K. Carlson
- G01 - MEASURING TESTING
Information Patent Grant
Method to control semiconductor film deposition characteristics
- Patent number 7,718,225
- Issue date May 18, 2010
- Applied Materials, Inc.
- Satheesh Kuppurao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for in-situ generation of reactive etch and growth specie i...
- Patent number 7,709,391
- Issue date May 4, 2010
- Applied Materials, Inc.
- Satheesh Kuppurao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SELF-ALIGNED PROCESS FOR SUB-10NM FIN FORMATION
- Publication number 20180277649
- Publication date Sep 27, 2018
- Applied Materials, Inc.
- Zhiyuan YE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR SILICIDE FORMATION
- Publication number 20180166288
- Publication date Jun 14, 2018
- Applied Materials, Inc.
- Hua CHUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS CHAMBER HAVING SEPARATE PROCESS GAS AND PURGE GAS REGIONS
- Publication number 20180138031
- Publication date May 17, 2018
- Applied Materials, Inc.
- Joseph M. RANISH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER
- Publication number 20180084610
- Publication date Mar 22, 2018
- Applied Materials, Inc.
- Kin Pong LO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UPPER DOME WITH INJECTION ASSEMBLY
- Publication number 20180066382
- Publication date Mar 8, 2018
- Applied Materials, Inc.
- Paul BRILLHART
- C30 - CRYSTAL GROWTH
Information Patent Application
QUARTZ UPPER AND LOWER DOMES
- Publication number 20180005856
- Publication date Jan 4, 2018
- Applied Materials, Inc.
- Anzhong CHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INDEPENDENT RADIANT GAS PREHEATING FOR PRECURSOR DISASSOCIATION CON...
- Publication number 20170362702
- Publication date Dec 21, 2017
- Applied Materials, Inc.
- David Keith CARLSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS
- Publication number 20170130359
- Publication date May 11, 2017
- Applied Materials, Inc.
- Joseph M. RANISH
- C30 - CRYSTAL GROWTH
Information Patent Application
ABSORBING LAMPHEAD FACE
- Publication number 20160336205
- Publication date Nov 17, 2016
- Applied Materials, Inc.
- Paul BRILLHART
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EPI BASE RING
- Publication number 20160230276
- Publication date Aug 11, 2016
- Applied Materials, Inc.
- STEVE ABOAGYE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS
- Publication number 20160138188
- Publication date May 19, 2016
- Applied Materials, Inc.
- Joseph M. RANISH
- C30 - CRYSTAL GROWTH
Information Patent Application
ATMOSPHERIC EPITAXIAL DEPOSITION CHAMBER
- Publication number 20160068959
- Publication date Mar 10, 2016
- Applied Materials, Inc.
- Shu-Kwan LAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HONEYCOMB MULTI-ZONE GAS DISTRIBUTION PLATE
- Publication number 20160068955
- Publication date Mar 10, 2016
- Applied Materials, Inc.
- Paul BRILLHART
- C30 - CRYSTAL GROWTH
Information Patent Application
ONE-PIECE INJECTOR ASSEMBLY AND ONE-PIECE EXHAUST LINER
- Publication number 20150368830
- Publication date Dec 24, 2015
- Applied Materials, Inc.
- Paul BRILLHART
- C30 - CRYSTAL GROWTH
Information Patent Application
UPPER DOME WITH INJECTION ASSEMBLY
- Publication number 20150233016
- Publication date Aug 20, 2015
- Applied Materials, Inc.
- Paul BRILLHART
- C30 - CRYSTAL GROWTH
Information Patent Application
ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER
- Publication number 20140376898
- Publication date Dec 25, 2014
- Kin Pong Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATED LINER ASSEMBLY FOR A SEMICONDUCTOR PROCESSING CHAMBER
- Publication number 20140345526
- Publication date Nov 27, 2014
- Applied Materials, Inc.
- Joseph M. RANISH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED LINER ASSEMBLY FOR A SEMICONDUCTOR PROCESSING CHAMBER
- Publication number 20140345525
- Publication date Nov 27, 2014
- Applied Materials, Inc.
- Joseph M. RANISH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ABSORBING LAMPHEAD FACE
- Publication number 20140319120
- Publication date Oct 30, 2014
- Paul BRILLHART
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPI BASE RING
- Publication number 20140261185
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- STEVE ABOAGYE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS
- Publication number 20140273419
- Publication date Sep 18, 2014
- Joseph M. RANISH
- C30 - CRYSTAL GROWTH
Information Patent Application
MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS
- Publication number 20140199785
- Publication date Jul 17, 2014
- Joseph M. RANISH
- C30 - CRYSTAL GROWTH
Information Patent Application
QUARTZ UPPER AND LOWER DOMES
- Publication number 20140199056
- Publication date Jul 17, 2014
- Anzhong CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDEPENDENT RADIANT GAS PREHEATING FOR PRECURSOR DISASSOCIATION CON...
- Publication number 20140175054
- Publication date Jun 26, 2014
- Applied Materials, Inc.
- David Keith CARLSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM WITH LAMPHEAD HAVING TEMPERATURE MANAGE...
- Publication number 20130298832
- Publication date Nov 14, 2013
- JOSEPH M. RANISH
- C30 - CRYSTAL GROWTH
Information Patent Application
PROCESS CHAMBER HAVING SEPARATE PROCESS GAS AND PURGE GAS REGIONS
- Publication number 20130288460
- Publication date Oct 31, 2013
- Joseph M. RANISH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR SUBLIMATING SOLID STATE PRECURSORS
- Publication number 20130105483
- Publication date May 2, 2013
- Applied Materials, Inc.
- David K. CARLSON
- C30 - CRYSTAL GROWTH
Information Patent Application
SEMICONDUCTOR SUBSTRATE PROCESSING SYSTEM
- Publication number 20120266819
- Publication date Oct 25, 2012
- Applied Materials, Inc.
- ERROL ANTONIO C. SANCHEZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR DEPOSITION OF MATERIALS ON A SUBSTRATE
- Publication number 20120270384
- Publication date Oct 25, 2012
- Applied Materials, Inc.
- ERROL ANTONIO C. SANCHEZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF REMOVING CONTAMINANTS AND NATIVE OXIDES FROM A SUBSTRATE...
- Publication number 20120034761
- Publication date Feb 9, 2012
- Applied Materials, Inc.
- Satheesh Kuppurao
- H01 - BASIC ELECTRIC ELEMENTS

Satheesh KUPPURAO

Person

Patents Grantslast 30 patents

Upper dome with injection assembly

Methods for titanium silicide formation using TiCl4 precursor and s...

Absorbing reflector for semiconductor processing chamber

Self-aligned process for sub-10nm fin formation

Substrate processing system with lamphead having temperature manage...

EPI base ring

Multizone control of lamps in a conical lamphead using pyrometers

Process chamber having separate process gas and purge gas regions

Upper dome with injection assembly

Absorbing lamphead face

Absorbing reflector for semiconductor processing chamber

Quartz upper and lower domes

Multizone control of lamps in a conical lamphead using pyrometers

Semiconductor substrate processing system

EPI base ring

Multizone control of lamps in a conical lamphead using pyrometers

Methods for depositing layers having reduced interfacial contamination

Apparatus to control semiconductor film deposition characteristics

Methods and apparatus for insitu analysis of gases in electronic de...

Multizone control of lamps in a conical lamphead using pyrometers

Method of removing contaminants and native oxides from a substrate...

Independent radiant gas preheating for precursor disassociation con...

Apparatus and methods for chemical vapor deposition

Methods and apparatus for insitu analysis of gases in electronic de...

Independent radiant gas preheating for precursor disassociation con...

Apparatus and methods for chemical vapor deposition

Elimination of flow and pressure gradients in low utilization proce...

Methods and apparatus for insitu analysis of gases in electronic de...

Method to control semiconductor film deposition characteristics

Methods for in-situ generation of reactive etch and growth specie i...

Patents Applicationslast 30 patents

SELF-ALIGNED PROCESS FOR SUB-10NM FIN FORMATION

METHODS FOR SILICIDE FORMATION

PROCESS CHAMBER HAVING SEPARATE PROCESS GAS AND PURGE GAS REGIONS

ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER

UPPER DOME WITH INJECTION ASSEMBLY

QUARTZ UPPER AND LOWER DOMES

INDEPENDENT RADIANT GAS PREHEATING FOR PRECURSOR DISASSOCIATION CON...

MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS

ABSORBING LAMPHEAD FACE

EPI BASE RING

MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS

ATMOSPHERIC EPITAXIAL DEPOSITION CHAMBER

HONEYCOMB MULTI-ZONE GAS DISTRIBUTION PLATE

ONE-PIECE INJECTOR ASSEMBLY AND ONE-PIECE EXHAUST LINER

UPPER DOME WITH INJECTION ASSEMBLY

ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER

COATED LINER ASSEMBLY FOR A SEMICONDUCTOR PROCESSING CHAMBER

COATED LINER ASSEMBLY FOR A SEMICONDUCTOR PROCESSING CHAMBER

ABSORBING LAMPHEAD FACE

EPI BASE RING

MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS

MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS

QUARTZ UPPER AND LOWER DOMES

INDEPENDENT RADIANT GAS PREHEATING FOR PRECURSOR DISASSOCIATION CON...

SUBSTRATE PROCESSING SYSTEM WITH LAMPHEAD HAVING TEMPERATURE MANAGE...

PROCESS CHAMBER HAVING SEPARATE PROCESS GAS AND PURGE GAS REGIONS

APPARATUS FOR SUBLIMATING SOLID STATE PRECURSORS

SEMICONDUCTOR SUBSTRATE PROCESSING SYSTEM

APPARATUS FOR DEPOSITION OF MATERIALS ON A SUBSTRATE

METHOD OF REMOVING CONTAMINANTS AND NATIVE OXIDES FROM A SUBSTRATE...