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Sathya Mani
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Fremont, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Hot edge ring with sloped upper surface
Patent number
8,084,375
Issue date
Dec 27, 2011
Lam Research Corporation
Akira Koshiishi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
HOT EDGE RING WITH SLOPED UPPER SURFACE
Publication number
20110104884
Publication date
May 5, 2011
LAM RESEARCH CORPORATION
Akira Koshiishi
H01 - BASIC ELECTRIC ELEMENTS