Sathya Swaroop GANTA

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for toroidal plasma generation
- Patent number 12,125,689
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Kartik Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular microwave source with multiple metal housings
- Patent number 12,033,835
- Issue date Jul 9, 2024
- Applied Materials, Inc.
- Philip Allan Kraus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic holding structures for plasma processing applications
- Patent number 12,020,965
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Andrew Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetic-material shield around plasma chambers near pedestal
- Patent number 11,984,302
- Issue date May 14, 2024
- Applied Materials, Inc.
- Job George Konnoth Joseph
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shunt door for magnets in plasma process chamber
- Patent number 11,959,174
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- Kallol Bera
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HEATER PLATES WITH DISTRIBUTED PURGE CHANNELS, RF MESHES AND GROUND...
- Publication number 20250022694
- Publication date Jan 16, 2025
- Applied Materials, Inc.
- Pranav Vijay Gadre
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONICAL IMPEDANCE TRANSFORMER FOR MICROWAVE PLASMA PROCESSING
- Publication number 20240395506
- Publication date Nov 28, 2024
- Applied Materials, Inc.
- Kenneth Brian Doering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC HOLDING STRUCTURES FOR PLASMA PROCESSING APPLICATIONS
- Publication number 20240297059
- Publication date Sep 5, 2024
- Applied Materials, Inc.
- Andrew NGUYEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHUNT DOOR FOR MAGNETS IN PLASMA PROCESS CHAMBER
- Publication number 20240271284
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- Kallol BERA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR TOROIDAL PLASMA GENERATION
- Publication number 20240087859
- Publication date Mar 14, 2024
- Kartik RAMASWAMY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROTARY ELECTRICAL FEEDTHROUGH INTEGRATION FOR PROCESS CHAMBER
- Publication number 20240018646
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- ANANTHA SUBRAMANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOWER DEPOSITION CHAMBER CCP ELECTRODE CLEANING SOLUTION
- Publication number 20230377855
- Publication date Nov 23, 2023
- Applied Materials, Inc.
- Mukesh Shivakumaraiah CHITRADURGA
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS WITH HIGH CONDUCTANCE COMPONENTS FOR CHAMBER C...
- Publication number 20220349050
- Publication date Nov 3, 2022
- Applied Materials, Inc.
- Rick KUSTRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETIC-MATERIAL SHIELD AROUND PLASMA CHAMBERS NEAR PEDESTAL
- Publication number 20220139679
- Publication date May 5, 2022
- Applied Materials, Inc.
- Job George KONNOTH JOSEPH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC HOLDING STRUCTURES FOR PLASMA PROCESSING APPLICATIONS
- Publication number 20220122866
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Andrew NGUYEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD DESIGN TO CONTROL STRAY DEPOSITION
- Publication number 20220064797
- Publication date Mar 3, 2022
- Applied Materials, Inc.
- Akshay DHANAKSHIRUR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULAR MICROWAVE SOURCE WITH MULTIPLE METAL HOUSINGS
- Publication number 20210391149
- Publication date Dec 16, 2021
- Applied Materials, Inc.
- Philip Allan Kraus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHUNT DOOR FOR MAGNETS IN PLASMA PROCESS CHAMBER
- Publication number 20210269919
- Publication date Sep 2, 2021
- Applied Materials, Inc.
- Kallol BERA
- H01 - BASIC ELECTRIC ELEMENTS

Sathya Swaroop GANTA

Person

Patents Grantslast 30 patents

Methods and apparatus for toroidal plasma generation

Modular microwave source with multiple metal housings

Magnetic holding structures for plasma processing applications

Magnetic-material shield around plasma chambers near pedestal

Shunt door for magnets in plasma process chamber

Patents Applicationslast 30 patents

HEATER PLATES WITH DISTRIBUTED PURGE CHANNELS, RF MESHES AND GROUND...

CONICAL IMPEDANCE TRANSFORMER FOR MICROWAVE PLASMA PROCESSING

MAGNETIC HOLDING STRUCTURES FOR PLASMA PROCESSING APPLICATIONS

SHUNT DOOR FOR MAGNETS IN PLASMA PROCESS CHAMBER

METHODS AND APPARATUS FOR TOROIDAL PLASMA GENERATION

ROTARY ELECTRICAL FEEDTHROUGH INTEGRATION FOR PROCESS CHAMBER

LOWER DEPOSITION CHAMBER CCP ELECTRODE CLEANING SOLUTION

METHOD AND APPARATUS WITH HIGH CONDUCTANCE COMPONENTS FOR CHAMBER C...

MAGNETIC-MATERIAL SHIELD AROUND PLASMA CHAMBERS NEAR PEDESTAL

MAGNETIC HOLDING STRUCTURES FOR PLASMA PROCESSING APPLICATIONS

SHOWERHEAD DESIGN TO CONTROL STRAY DEPOSITION

MODULAR MICROWAVE SOURCE WITH MULTIPLE METAL HOUSINGS

SHUNT DOOR FOR MAGNETS IN PLASMA PROCESS CHAMBER