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Satohiko Hoshino
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Yamanashi-Ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for aligning chip components relative to substrate by using...
Patent number
10,553,455
Issue date
Feb 4, 2020
Tokyo Electron Limited
Shinya Kikuta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Imprinting method
Patent number
9,370,875
Issue date
Jun 21, 2016
Tokyo Electron Limited
Satohiko Hoshino
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Substrate wiring method and semiconductor manufacturing device
Patent number
8,940,638
Issue date
Jan 27, 2015
Tokyo Electron Limited
Satohiko Hoshino
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Fabrication of low dielectric constant insulating film
Patent number
7,645,481
Issue date
Jan 12, 2010
Tokyo Electron Limited
Masaru Sasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for forming insulating layer
Patent number
7,569,497
Issue date
Aug 4, 2009
Tokyo Electron Limited
Toshiaki Hongoh
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method of manufacturing trench structure for device
Patent number
7,176,142
Issue date
Feb 13, 2007
Tokyo Electron Limited
Nobutaka Mizutani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fabrication process of a semiconductor device
Patent number
6,890,848
Issue date
May 10, 2005
Tokyo Electron Limited
Kaoru Maekawa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR ALIGNING CHIP COMPONENTS RELATIVE TO SUBSTRATE BY USING...
Publication number
20190096697
Publication date
Mar 28, 2019
TOKYO ELECTRON LIMITED
Shinya KIKUTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20130056024
Publication date
Mar 7, 2013
IWATANI CORPORATION
Satohiko Hoshino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE WIRING METHOD AND SEMICONDUCTOR MANUFACTURING DEVICE
Publication number
20130040459
Publication date
Feb 14, 2013
IWATANI CORPORATION
Satohiko Hoshino
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IMPRINTING METHOD
Publication number
20120306122
Publication date
Dec 6, 2012
TOKYO ELECTRON LIMITED
Satohiko HOSHINO
B82 - NANO-TECHNOLOGY
Information
Patent Application
Vacuum Processing Apparatus, Vacuum Processing Method, and Micro-Ma...
Publication number
20120071003
Publication date
Mar 22, 2012
Kazuya Dobashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
QUANTUM DOT FORMING METHOD, STORAGE MEDIUM STORING A PROGRAM AND SU...
Publication number
20120052658
Publication date
Mar 1, 2012
TOKYO ELECTRON LIMITED
Song Yun KANG
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
FABRICATION OF LOW DIELECTRIC CONSTANT INSULATING FILM
Publication number
20100132613
Publication date
Jun 3, 2010
TOKYO ELECTRON LIMITED
Masaru SASAKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of manufacturing trench structure for device
Publication number
20070148985
Publication date
Jun 28, 2007
Nobutaka Mizutani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Fabrication of low dielectric constant insulating film
Publication number
20070098890
Publication date
May 3, 2007
Masaru Sasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Forming method of low dielectric constant insulating film of semico...
Publication number
20060154492
Publication date
Jul 13, 2006
TOKYO ELECTRON LIMITED
Shinji Ide
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor manufacturing method and semiconductor manufacturing...
Publication number
20050153533
Publication date
Jul 14, 2005
TOKYO ELECTRON LIMITED
Satohiko Hoshino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for forming insulating layer
Publication number
20050148167
Publication date
Jul 7, 2005
TOKYO ELECTRON LIMITED
Toshiaki Hongoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of manufacturing trench structure for device
Publication number
20040002214
Publication date
Jan 1, 2004
Nobutaka Mizutani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Fabrication process of a semiconductor device
Publication number
20020164869
Publication date
Nov 7, 2002
Kaoru Maekawa
H01 - BASIC ELECTRIC ELEMENTS