Satohiro Okayama

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing device, substrate conveying device, and substr...
- Patent number 6,742,977
- Issue date Jun 1, 2004
- Kokusai Electric Co., Ltd.
- Satohiro Okayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 6,485,604
- Issue date Nov 26, 2002
- Kokusai Electric Co., Ltd.
- Satohiro Okayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 5,772,770
- Issue date Jun 30, 1998
- Kokusai Electric Co, Ltd.
- Atsuhiko Suda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing apparatus and semiconductor manufacturing method
- Publication number 20010035124
- Publication date Nov 1, 2001
- Satohiro Okayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...