Satoko Seta

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Inagi-shi, JP

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Patents Applicationslast 30 patents

Information Patent Application
METHOD OF CLEANING A FILM-FORMING APPARATUS
- Publication number 20130220377
- Publication date Aug 29, 2013
- L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEO...
- Yuusuke SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of cleaning a film-forming apparatus and film-forming apparatus
- Publication number 20050082002
- Publication date Apr 21, 2005
- Yuusuke Sato
- B08 - CLEANING