Satomi Hamada

Person

Fujisawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for cleaning PVA brush
- Patent number 11,382,412
- Issue date Jul 12, 2022
- Ebara Corporation
- Jin-Goo Park
- B08 - CLEANING
Information Patent Grant
Wafer drying apparatus and wafer drying method
- Patent number 10,229,841
- Issue date Mar 12, 2019
- Ebara Corporation
- Masayoshi Imai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus and method for determining timing of r...
- Patent number 8,608,858
- Issue date Dec 17, 2013
- Ebara Corporation
- Satomi Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for conveying a workpiece
- Patent number 6,595,220
- Issue date Jul 22, 2003
- Ebara Corporation
- Toshiro Maekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for conveying a workpiece
- Patent number 6,221,171
- Issue date Apr 24, 2001
- Ebara Corporation
- Toshiro Maekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Washing method and washing apparatus
- Patent number 6,106,635
- Issue date Aug 22, 2000
- Ebara Corporation
- Satomi Hamada
- B08 - CLEANING
Information Patent Grant
Cleaning apparatus
- Patent number 5,966,765
- Issue date Oct 19, 1999
- Ebara Corporation
- Satomi Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of and apparatus for cleaning workpiece
- Patent number 5,860,181
- Issue date Jan 19, 1999
- Ebara Corporation
- Toshiro Maekawa
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING DEVICE, SUBSTRATE CLEANING METHOD, AND SUBSTRATE...
- Publication number 20240351078
- Publication date Oct 24, 2024
- EBARA CORPORATION
- Naoyuki HANDA
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS
- Publication number 20230234107
- Publication date Jul 27, 2023
- EBARA CORPORATION
- NAOYUKI HANDA
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20210039142
- Publication date Feb 11, 2021
- EBARA CORPORATION
- Chikako TAKATOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CLEANING PVA BRUSH
- Publication number 20200281347
- Publication date Sep 10, 2020
- EBARA CORPORATION
- Jin-Goo PARK
- B08 - CLEANING
Information Patent Application
WAFER DRYING APPARATUS AND WAFER DRYING METHOD
- Publication number 20160372344
- Publication date Dec 22, 2016
- EBARA CORPORATION
- Masayoshi IMAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20100043839
- Publication date Feb 25, 2010
- Satomi Hamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20090081810
- Publication date Mar 26, 2009
- EBARA CORPORATION
- Satomi Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for cleaning a substrate having metal interconnects
- Publication number 20080017220
- Publication date Jan 24, 2008
- Masako Kodera
- B08 - CLEANING
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20050026455
- Publication date Feb 3, 2005
- Satomi Hamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for cleaning a substrate having metal interconnects
- Publication number 20040177655
- Publication date Sep 16, 2004
- Masako Kodera
- B08 - CLEANING
Information Patent Application
Apparatus for conveying a workpiece
- Publication number 20010009157
- Publication date Jul 26, 2001
- Toshiro Maekawa
- H01 - BASIC ELECTRIC ELEMENTS

Satomi Hamada

Person

Patents Grantslast 30 patents

Method and apparatus for cleaning PVA brush

Wafer drying apparatus and wafer drying method

Substrate cleaning apparatus and method for determining timing of r...

Apparatus for conveying a workpiece

Method and apparatus for conveying a workpiece

Washing method and washing apparatus

Cleaning apparatus

Method of and apparatus for cleaning workpiece

Patents Applicationslast 30 patents

SUBSTRATE CLEANING DEVICE, SUBSTRATE CLEANING METHOD, AND SUBSTRATE...

SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

METHOD AND APPARATUS FOR CLEANING PVA BRUSH

WAFER DRYING APPARATUS AND WAFER DRYING METHOD

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Apparatus for cleaning a substrate having metal interconnects

Substrate processing apparatus and substrate processing method

Apparatus for cleaning a substrate having metal interconnects

Apparatus for conveying a workpiece