Satoru Arakawa

Person

Nagano, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Polishing head and polishing apparatus
- Patent number 9,278,425
- Issue date Mar 8, 2016
- Shin-Etsu Handotai Co., Ltd.
- Hiromasa Hashimoto
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head and polishing apparatus
- Patent number 8,636,561
- Issue date Jan 28, 2014
- Shin-Etsu Handotai Co., Ltd.
- Hisashi Masumura
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head, polishing apparatus and method for demounting workp...
- Patent number 8,323,075
- Issue date Dec 4, 2012
- Shin-Etsu Handotai Co., Ltd.
- Hisashi Masumura
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head and polishing apparatus
- Patent number 8,092,281
- Issue date Jan 10, 2012
- Shin-Etsu Handotai Co., Ltd.
- Hisashi Masumura
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head and polishing apparatus having the same
- Patent number 8,021,210
- Issue date Sep 20, 2011
- Shin-Etsu Handotai Co., Ltd.
- Hisashi Masumura
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system for polishing wafer
- Patent number 5,908,347
- Issue date Jun 1, 1999
- Fujikoshi Kikai Kogyo Kabushiki Kaisha
- Makoto Nakajima
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
POLISHING HEAD AND POLISHING APPARATUS
- Publication number 20120289129
- Publication date Nov 15, 2012
- FUJIKOSHI MACHINERY CORP.
- Hiromasa Hashimoto
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD AND POLISHING APPARATUS
- Publication number 20110136414
- Publication date Jun 9, 2011
- Shin-Etsu Handotai Co., Ltd.
- Hisashi Masumura
- B24 - GRINDING POLISHING
Information Patent Application
METHOD FOR MANUFACTURING POLISHING HEAD AND POLISHING APPARATUS
- Publication number 20110070813
- Publication date Mar 24, 2011
- Shin-Etsu Handotai Co., Ltd.
- Hisashi Masumura
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD AND POLISHING APPARATUS HAVING THE SAME
- Publication number 20100291838
- Publication date Nov 18, 2010
- Shin-Etsu Handotai Co., Ltd.
- Hisashi Masumura
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD, POLISHING APPARATUS AND METHOD FOR DEMOUNTING WORKP...
- Publication number 20100233945
- Publication date Sep 16, 2010
- Shin-Etsu Handotai Co., Ltd.
- Hisashi Masumura
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD AND POLISHING APPARATUS
- Publication number 20100210192
- Publication date Aug 19, 2010
- Shin-Etsu Handotai Co., Ltd.
- Hisashi Masumura
- B24 - GRINDING POLISHING
Information Patent Application
Polishing head and polishing apparatus
- Publication number 20090291623
- Publication date Nov 26, 2009
- Shin-Etsu Handotai Co., Ltd.
- Hisashi Masumura
- B24 - GRINDING POLISHING

Satoru Arakawa

Person

Patents Grantslast 30 patents

Polishing head and polishing apparatus

Polishing head and polishing apparatus

Polishing head, polishing apparatus and method for demounting workp...

Polishing head and polishing apparatus

Polishing head and polishing apparatus having the same

Polishing system for polishing wafer

Patents Applicationslast 30 patents

POLISHING HEAD AND POLISHING APPARATUS

POLISHING HEAD AND POLISHING APPARATUS

METHOD FOR MANUFACTURING POLISHING HEAD AND POLISHING APPARATUS

POLISHING HEAD AND POLISHING APPARATUS HAVING THE SAME

POLISHING HEAD, POLISHING APPARATUS AND METHOD FOR DEMOUNTING WORKP...

POLISHING HEAD AND POLISHING APPARATUS

Polishing head and polishing apparatus