Satoru Fukuhara

Person

Hitachinaka-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 8,604,430
- Issue date Dec 10, 2013
- Hitachi, Ltd.
- Yuko Iwabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of an inspection system using an electron beam
- Patent number 8,134,125
- Issue date Mar 13, 2012
- Hitachi, Ltd.
- Yuko Iwabuchi
- G01 - MEASURING TESTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 7,439,506
- Issue date Oct 21, 2008
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 7,232,996
- Issue date Jun 19, 2007
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 7,012,252
- Issue date Mar 14, 2006
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 6,987,265
- Issue date Jan 17, 2006
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for inspecting patterns of a semiconductor dev...
- Patent number 6,512,227
- Issue date Jan 28, 2003
- Hitachi, Ltd.
- Yuko Iwabuchi
- G01 - MEASURING TESTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 6,452,178
- Issue date Sep 17, 2002
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 6,348,690
- Issue date Feb 19, 2002
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Cathode having a reservoir and method of manufacturing the same
- Patent number 5,838,096
- Issue date Nov 17, 1998
- Hitachi, Ltd.
- Hiroyuki Shinada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron source and electron beam-emitting apparatus equipped with...
- Patent number 5,834,781
- Issue date Nov 10, 1998
- Hitachi, Ltd.
- Satoru Fukuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Schottky emission cathode and a method of stabilizing the same
- Patent number 5,616,926
- Issue date Apr 1, 1997
- Hitachi, Ltd.
- Hiroyuki Shinada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 5,608,218
- Issue date Mar 4, 1997
- Hitachi, Ltd.
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of fabricating electric circuit pattern on thi...
- Patent number 5,162,240
- Issue date Nov 10, 1992
- Hitachi, Ltd.
- Norio Saitou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 5,160,884
- Issue date Nov 3, 1992
- Hitachi, Ltd.
- Hideo Todokoro
- G01 - MEASURING TESTING
Information Patent Grant
Magnetic field measurement optimization apparatus using a charged p...
- Patent number 5,111,141
- Issue date May 5, 1992
- Hitachi, Ltd.
- Satoru Fukuhara
- G01 - MEASURING TESTING
Information Patent Grant
Voltage measurement method using electron beam
- Patent number 5,093,616
- Issue date Mar 3, 1992
- Hitachi, Ltd.
- Shigemitsu Seitoh
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle detector
- Patent number 4,868,394
- Issue date Sep 19, 1989
- Hitachi, Ltd.
- Satoru Fukuhara
- G01 - MEASURING TESTING
Information Patent Grant
Piezoelectric actuator control apparatus
- Patent number 4,841,191
- Issue date Jun 20, 1989
- Hitachi, Ltd.
- Keiji Takada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Magnetic/electric field measuring device by means of an electron beam
- Patent number 4,803,430
- Issue date Feb 7, 1989
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope
- Patent number 4,687,931
- Issue date Aug 18, 1987
- Hitachi, Ltd.
- Satoru Fukuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam microprobe apparatus
- Patent number 4,670,652
- Issue date Jun 2, 1987
- Hitachi, Ltd.
- Mikio Ichihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Potential analyzer
- Patent number 4,629,889
- Issue date Dec 16, 1986
- Hitachi, Ltd.
- Hideo Todokoro
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for focusing a charged particle beam onto a specimen
- Patent number 4,605,860
- Issue date Aug 12, 1986
- Hitachi, Ltd.
- Satoru Fukuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Small-dimension measurement system by scanning electron beam
- Patent number 4,600,839
- Issue date Jul 15, 1986
- Hitachi, Ltd.
- Mikio Ichihashi
- G01 - MEASURING TESTING
Information Patent Grant
Image display system for a stroboscopic scanning electron microscope
- Patent number 4,581,534
- Issue date Apr 8, 1986
- Hitachi, Ltd.
- Hideo Todokoro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Potential analyzer
- Patent number 4,554,455
- Issue date Nov 19, 1985
- Hitachi, Ltd.
- Hideo Todokoro
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for measuring specimen potential in electron microscope
- Patent number 4,355,232
- Issue date Oct 19, 1982
- Hitachi, Ltd.
- Hideo Todokoro
- G01 - MEASURING TESTING
Information Patent Grant
Field emission electron gun
- Patent number 4,274,035
- Issue date Jun 16, 1981
- Hitachi, Ltd.
- Satoru Fukuhara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND AN APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON...
- Publication number 20120132801
- Publication date May 31, 2012
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON BEAM
- Publication number 20090057556
- Publication date Mar 5, 2009
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20070215803
- Publication date Sep 20, 2007
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20060151699
- Publication date Jul 13, 2006
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20050205782
- Publication date Sep 22, 2005
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20020092986
- Publication date Jul 18, 2002
- Yuko Iwabuchi
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting patterns of a semiconductor dev...
- Publication number 20020024021
- Publication date Feb 28, 2002
- Hitachi, Ltd.
- Yuko Iwabuchi
- G01 - MEASURING TESTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20010030294
- Publication date Oct 18, 2001
- Hitachi, Ltd
- Yuko Iwabuchi
- G01 - MEASURING TESTING

Satoru Fukuhara

Person

Patents Grantslast 30 patents

Method and an apparatus of an inspection system using an electron beam

Method and apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Method and apparatus for inspecting patterns of a semiconductor dev...

Method and an apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Cathode having a reservoir and method of manufacturing the same

Electron source and electron beam-emitting apparatus equipped with...

Schottky emission cathode and a method of stabilizing the same

Scanning electron microscope

Method and apparatus of fabricating electric circuit pattern on thi...

Charged particle beam device

Magnetic field measurement optimization apparatus using a charged p...

Voltage measurement method using electron beam

Charged particle detector

Piezoelectric actuator control apparatus

Magnetic/electric field measuring device by means of an electron beam

Scanning electron microscope

Charged particle beam microprobe apparatus

Potential analyzer

Apparatus for focusing a charged particle beam onto a specimen

Small-dimension measurement system by scanning electron beam

Image display system for a stroboscopic scanning electron microscope

Potential analyzer

Apparatus for measuring specimen potential in electron microscope

Field emission electron gun

Patents Applicationslast 30 patents

METHOD AND AN APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON...

METHOD AND APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON BEAM

Method and an apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Method and apparatus for inspecting patterns of a semiconductor dev...

Method and an apparatus of an inspection system using an electron beam