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Yokohama, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Chipping detection system and method
Patent number
5,157,735
Issue date
Oct 20, 1992
Hitachi, Ltd.
Shunji Maeda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Apparatus and method of pattern detection based on a scanning trans...
Patent number
5,051,585
Issue date
Sep 24, 1991
Hitachi, Ltd.
Hiroya Koshishiba
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Electron microscope
Patent number
4,990,776
Issue date
Feb 5, 1991
Hitachi, Ltd.
Satoru Fushimi
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for detecting defect in circuit pattern of a m...
Patent number
4,814,615
Issue date
Mar 21, 1989
Hitachi, Ltd.
Satoru Fushimi
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method of and apparatus for checking geometry of multi-layer patter...
Patent number
4,791,586
Issue date
Dec 13, 1988
Hitachi, Ltd.
Shunji Maeda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method of detecting pattern defect and its apparatus
Patent number
4,614,430
Issue date
Sep 30, 1986
Hitachi Ltd.
Yasuhiko Hara
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern detection system
Patent number
4,508,453
Issue date
Apr 2, 1985
Hitachi, Ltd.
Yasuhiko Hara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY