Satoru IDE

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Patents Grantslast 30 patents

Information Patent Grant
Grinding method of composite substrate including resin and grinding...
- Patent number 11,745,299
- Issue date Sep 5, 2023
- OKAMOTO MACHINE TOOL WORKS, LTD.
- Eiichi Yamamoto
- B24 - GRINDING POLISHING
Information Patent Grant
Semiconductor substrate planarization apparatus and planarization m...
- Patent number 8,366,514
- Issue date Feb 5, 2013
- Okamoto Machine Tool Works, Ltd.
- Satoru Ide
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing device and polishing pad component exchange device and me...
- Patent number 6,520,895
- Issue date Feb 18, 2003
- Nikon Corporation
- Tatsuya Senga
- B24 - GRINDING POLISHING
Information Patent Grant
Method of detecting end point of polishing of wafer and apparatus f...
- Patent number 6,342,166
- Issue date Jan 29, 2002
- Nikon Corporation
- Satoru Ide
- B24 - GRINDING POLISHING
Information Patent Grant
Method of detecting end point of polishing of wafer and apparatus f...
- Patent number 6,183,656
- Issue date Feb 6, 2001
- Okamoto Machine Tool Works, Ltd.
- Satoru Ide
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE GRINDING DEVICE AND SUBSTRATE GRINDING METHOD
- Publication number 20230079520
- Publication date Mar 16, 2023
- OKAMOTO MACHINE TOOL WORKS, LTD.
- Satoru IDE
- B24 - GRINDING POLISHING
Information Patent Application
GRINDING METHOD OF COMPOSITE SUBSTRATE INCLUDING RESIN AND GRINDING...
- Publication number 20200198083
- Publication date Jun 25, 2020
- OKAMOTO MACHINE TOOL WORKS, LTD.
- Eiichi YAMAMOTO
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE GRINDING DEVICE AND SUBSTRATE GRINDING METHOD
- Publication number 20200086450
- Publication date Mar 19, 2020
- OKAMOTO MACHINE TOOL WORKS, LTD.
- Satoru IDE
- B24 - GRINDING POLISHING
Information Patent Application
SEMICONDUCTOR SUBSTRATE PLANARIZATION APPARATUS AND PLANARIZATION M...
- Publication number 20110165823
- Publication date Jul 7, 2011
- OKAMOTO MACHINE TOOL WORKS, LTD.
- Satoru IDE
- B24 - GRINDING POLISHING
Information Patent Application
Chemical-mechanical polishing apparatus, polishing pad and method f...
- Publication number 20030168169
- Publication date Sep 11, 2003
- Akira Ishikawa
- B24 - GRINDING POLISHING
Information Patent Application
Polishing device and polishing pad component exchange device and me...
- Publication number 20010041650
- Publication date Nov 15, 2001
- Nikon Corporation
- Tatsuya Senga
- B24 - GRINDING POLISHING