Satoru Iizuka

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Sendai-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for processing fine particle dust in plasma
- Patent number 6,893,532
- Issue date May 17, 2005
- Tohoku Techno Arch Co., Ltd.
- Noriyoshi Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generation apparatus
- Patent number 6,835,279
- Issue date Dec 28, 2004
- Hitachi Kokusai Electric Inc.
- Yunlong Li
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma generating apparatus and semiconductor manufacturing method
- Patent number 6,380,684
- Issue date Apr 30, 2002
- Hitachi Kokusai Electric Inc.
- Yunlong Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing system
- Patent number 6,376,796
- Issue date Apr 23, 2002
- Anelva Corporation
- Noriyoshi Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generation apparatus
- Patent number 6,238,512
- Issue date May 29, 2001
- Hitachi Kokusai Electric Inc.
- Yunlong Li
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA GENERATION APPARATUS
- Publication number 20030127191
- Publication date Jul 10, 2003
- YUNLONG LI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Plasma processing system
- Publication number 20010026575
- Publication date Oct 4, 2001
- Noriyoshi Sato
- H01 - BASIC ELECTRIC ELEMENTS