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Method of forming fine patterns
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Patent number 5,710,066
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Issue date Jan 20, 1998
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Mitsubishi Denki Kabushiki Kaisha
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Chikayuki Okamoto
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Method of forming fine patterns
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Patent number 5,688,723
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Issue date Nov 18, 1997
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Mitsubishi Denki Kabushiki Kaisha
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Chikayuki Okamoto
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Method of forming fine patterns
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Patent number 5,595,941
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Issue date Jan 21, 1997
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Mitsubishi Denki Kabushiki Kaisha
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Chikayuki Okamoto
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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MOS Semiconductor device
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Patent number 4,242,691
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Issue date Dec 30, 1980
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Mitsubishi Denki Kabushiki Kaisha
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Norihiko Kotani
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H01 - BASIC ELECTRIC ELEMENTS