Satoru KOIKE

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Oshu-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 10,720,312
- Issue date Jul 21, 2020
- Tokyo Electron Limited
- Hiromi Nitadori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mixed gas multiple line supply system and substrate processing appa...
- Patent number 10,550,471
- Issue date Feb 4, 2020
- Tokyo Electron Limited
- Shinobu Kawamorita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170287681
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Hiromi NITADORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Mixed Gas Multiple Line Supply System and Substrate Processing Appa...
- Publication number 20170253971
- Publication date Sep 7, 2017
- TOKYO ELECTRON LIMITED
- Shinobu KAWAMORITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL CONTAMINATION PREVENTING METHOD AND APPARATUS AND SUBSTRATE P...
- Publication number 20170252782
- Publication date Sep 7, 2017
- TOKYO ELECTRON LIMITED
- Satoru KOIKE
- B08 - CLEANING
Information Patent Application
VAPORIZATION RAW MATERIAL SUPPLYING DEVICE AND SUBSTRATE PROCESSING...
- Publication number 20170253969
- Publication date Sep 7, 2017
- TOKYO ELECTRON LIMITED
- Kenji INABA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXHAUST TRAP
- Publication number 20130061969
- Publication date Mar 14, 2013
- TOKYO ELECTRON LIMITED
- Satoru KOIKE
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL