Satoru KOIKE

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Oshu-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Pressure measuring device and exhaust system using the same, and su...
- Patent number 10,429,263
- Issue date Oct 1, 2019
- Tokyo Electron Limited
- Satoshi Kikuchi
- G01 - MEASURING TESTING
Information Patent Grant
Pressure measuring instrument and substrate processing apparatus pr...
- Patent number 9,360,390
- Issue date Jun 7, 2016
- Tokyo Electron Limited
- Satoru Koike
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
PRESSURE MEASURING DEVICE AND EXHAUST SYSTEM USING THE SAME, AND SU...
- Publication number 20170268952
- Publication date Sep 21, 2017
- TOKYO ELECTRON TOHOKU LIMITED
- Satoshi KIKUCHI
- G01 - MEASURING TESTING
Information Patent Application
PRESSURE MEASURING INSTRUMENT AND SUBSTRATE PROCESSING APPARATUS PR...
- Publication number 20140196545
- Publication date Jul 17, 2014
- TOKYO ELECTRON LIMITED
- Satoru KOIKE
- G01 - MEASURING TESTING