Satoru NAKAMURA

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Kurokawa-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of processing substrate, device manufacturing method, and pl...
- Patent number 11,081,351
- Issue date Aug 3, 2021
- Tokyo Electron Limited
- Yusuke Aoki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DETECTION METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20240030012
- Publication date Jan 25, 2024
- TOKYO ELECTRON LIMITED
- Naoki MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEASONING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20240030014
- Publication date Jan 25, 2024
- TOKYO ELECTRON LIMITED
- Yusuke SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230386794
- Publication date Nov 30, 2023
- TOKYO ELECTRON LIMITED
- Satoru NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210296090
- Publication date Sep 23, 2021
- TOKYO ELECTRON LIMITED
- Satoru NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, DEVICE MANUFACTURING METHOD, AND PL...
- Publication number 20210057212
- Publication date Feb 25, 2021
- TOKYO ELECTRON LIMITED
- Yusuke AOKI
- H01 - BASIC ELECTRIC ELEMENTS