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Satoru Nakamura
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Albany, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Organic mandrel protection process
Patent number
10,354,873
Issue date
Jul 16, 2019
Tokyo Electron Limited
Akiteru Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wrap-around contact integration scheme
Patent number
10,217,670
Issue date
Feb 26, 2019
Tokyo Electron Limited
Kandabara N. Tapily
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method for a structure pattern layer having a first materia...
Patent number
9,697,990
Issue date
Jul 4, 2017
Tokyo Electron Limited
Satoru Nakamura
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
WRAP-AROUND CONTACT INTEGRATION SCHEME
Publication number
20180068899
Publication date
Mar 8, 2018
TOKYO ELECTRON LIMITED
Kandabara N. Tapily
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Organic Mandrel Protection Process
Publication number
20170358450
Publication date
Dec 14, 2017
TOKYO ELECTRON LIMITED
Akiteru Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Etching Method For A Structure Pattern Layer Having A First Materia...
Publication number
20170140899
Publication date
May 18, 2017
TOKYO ELECTRON LIMITED
Satoru Nakamura
H01 - BASIC ELECTRIC ELEMENTS