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Satoru Ogasawara
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Gifu, JP
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last 30 patents
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Patent Grant
Method for forming gas cluster and method for forming thin film
Patent number
6,797,334
Issue date
Sep 28, 2004
Research Development Corporation of Japan
Makoto Akizuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Method for forming gas cluster and method for forming thin film
Publication number
20040037970
Publication date
Feb 26, 2004
Makoto Akizuki
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
Method for forming gas cluster and method for forming thin film
Publication number
20020068128
Publication date
Jun 6, 2002
Makoto Akizuki
C07 - ORGANIC CHEMISTRY
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Patent Application
Method for forming gas cluster and method for forming thin film
Publication number
20010010835
Publication date
Aug 2, 2001
Makoto Akizuki
C07 - ORGANIC CHEMISTRY